Abstract: A resonant sensor is disclosed which may be arranged to measure the pressure of a fluid. The resonant sensor comprises a diaphragm which may be exposed to a fluid; two supports provided on the diaphragm and a resonator having at least two beams with each beam being suspended between the two supports. The ends of each beam are attached to a corresponding support at more than one point. By attaching each end of the beams to a support at more than one point, the moments and reaction forces to which the support is subjected may be balanced so that distortion of the support and diaphragm due to vibration of the resonator beams is reduced. Consequently, the resonant sensor is able to provide more precise measurements.

Abstract: A resonant sensor is disclosed which may be arranged to measure the pressure of a fluid. The resonant sensor comprises a diaphragm which may be exposed to a fluid; two supports provided on the diaphragm and a resonator having at least two beams with each beam being suspended between the two supports. The ends of each beam are attached to a corresponding support at more than one point. By attaching each end of the beams to a support at more than one point, the moments and reaction forces to which the support is subjected may be balanced so that distortion of the support and diaphragm due to vibration of the resonator beams is reduced. Consequently, the resonant sensor is able to provide more precise measurements.

Abstract: A differential pressure sensing system is provided. The sensing system includes a membrane layer having a channel extending diametrically therein, and including one or more cavities provided radially outbound of the channel and at least one resonant beam disposed in the channel and configured to oscillate at a desired frequency. The system further includes sensing circuitry configured to detect oscillation of the at least one resonant beam indicative of deformation in the membrane layer.

Abstract: A method of making a pressure transducer diaphragm. One or more trenches are etched in a first surface of a first substrate. The trench is rendered etch resistant. A cavity is then formed in a second opposite surface of the first substrate defining a diaphragm supported by a frame with one or more hollow bosses stiffening the membrane.