Abstract: A pressure monitoring system for use in monitoring gas pressure within a rotating tube has a chemical delivery tube which projects into the rotating tube and whose distal end is sealed to the interior wall of the tube. A coaxial tube surrounds the delivery tube and forms a passageway between the two tubes which is in communication with the rotating tube interior through the seal mounting means. The gas pressure within the passageway is an indication of the pressure within the rotating tube, and is measured within a pressure monitoring unit which can control the pressure through the gas supply or through a low pressure device. In a second embodiment of the invention, a buffer gas supply coupling member is mounted to the coaxial tube and sealed to the exterior of the rotating tube to create a buffer zone. In a third embodiment of the invention, the buffer zone arrangement is modified to produce a more complete flow of buffer gases within the buffer zone.

Abstract: A direct drive system for use in, for example, the MCVD process, includes a motor housing affixed to a lathe headstock which contains electrical motor windings, and forms the stator of the motor. A hollow rotatable spindle is contained within the headstock housing and has winding and commutator magnets, thereby forming the armature of the motor. A chuck mounted on the spindle grasps the primary exhaust portion of a starter tube which intrudes into a sealed chamber within the spindle. A secondary exhaust tube intrudes into the chamber forms the other end thereof, and is attached to a low pressure source. Bores in the motor housing permit introduction of a flushing gas into the chamber which, in operation, sweeps the gases out of the tubes and chamber, thereby flushing out the starter tube.

Abstract: Apparatus embodying the invention includes first and second motors coupled to a carriage assembly for moving the carriage assembly back and forth between first and second end points. The first motor is for developing a force to drive the carriage in one direction and the second motor is for developing a force to drive the carriage in an opposite, second direction. When the first motor causes the movement of the carriage in one direction, the slowing, stopping and reversal of the carriage is achieved by varying the power supplied to the second motor relative to the power supplied to the first motor until the force exerted by the second motor first equals and then exceeds the force exerted by the second motor. So operated, the carriage motion is well controlled and exhibits little, if any, backlash.

Abstract: A hydrostatic guidance system for a moving carriage upon a lathe bed or other such machining has a plurality of fluid, preferably air bearings mounted on the carriage and a pressurized fluid manifold device for routing the pressurized fluid to the air bearings. The several air bearings are located and oriented on the carriage adjacent the rails or ways of the machine so that the carriage is made to float, contact free, over the ways for smooth, jerk free movement. At least one of the air bearings is mounted on the distal end of a bendable beam which, under pressure of the air, maintains the gap between the bearing and the way despite variations in the straightness or linearity of the way so as to maintain a uniform velocity profile.

Abstract: A nozzle for substantially laminar dispersion of gases at an angle to a central axis has a conically shaped portion and a stem portion. A chamfered bore allows a smooth entry of gas or vapor under pressure into a longitudinal bore within the stem portion which extends into the conical portion. A plurality of angularly oriented bores extend from the sloping face of the conical portion into the longitudinal bore forming sharp ridges at their intersection with the longitudinal bore, with the centerlines of the angular bores, all intersecting within the longitudinal bore. The conical portion is truncated and an axial bore extends from the truncated portion into the longitudinal bore. The diameters of the angular bores, the axial bore, and the longitudinal bore are chosen to insure the formation of sharp ridges to the exclusion of flat surfaces or lands.

Abstract: A sealing system for use in a chemical or gaseous delivery system has a delivery tube connected to a source of the material to be delivered and which intrudes into the revolving region where the material is to go. The sealing system has a secondary sealing nut affixed to the delivery end of the tube, and a primary sealing nut mounted on the secondary nut with a sealing member therebetween. When the region revolves, the two nuts are automatically tightened to hold the sealing member in firm and positive engagement with the housing surrounding the region.

Abstract: A dual seal system for retrofitting existing vapor deposition apparatus for starter tubes has a first tubular member which surrounds the chemical vapor delivery tube and forms a channel therewith for passage of starter tube gases to a stationary seal coupling member which, in turn, is connected to monitoring apparatus. A second tubular member surrounds the first tubular member and forms a passage therewith extending from behind a seal assembly in the starter tube to a bore in the coupling member connected to a buffer gas supply. The second tubular member also forms a third passageway with the interior wall of the arbor driving the starter tube and is held spaced therefrom by a perforated support member. The third passageway extends from a region behind the sealing system to a sealed buffer chamber in the coupling member, which is connected to a low pressure of vacuum source and to a pressure monitoring member.

Abstract: A sealing arrangement for use in a gas delivery system to a rotating tubular member has first and second disposable seals spaced apart to form a sealed buffer zone within the rotating tube. A supply coupling is connectable to a source of buffer gas and has an insert member which has one or more channels for routing the buffer gas into the buffer zone. The supply coupling is also connectable to a low pressure source and the insert member has one or more channels for routing the gases contained in the buffer zone out of the zone to the supply coupling, thus creating a continuous circulation of buffer gases.