Abstract: Apparatus and methods for calibrating a height-adjustable edge ring are described herein. In one example, a calibration jig for positioning an edge ring relative to a reference surface is provided that includes a transparent plate, a plurality of sensors coupled to a first side of the transparent plate, and a plurality of contact pads coupled to an opposing second side of the transparent plate.

Abstract: Apparatus and methods for calibrating a height-adjustable edge ring are described herein. In one example, a calibration jig for positioning an edge ring relative to a reference surface is provided that includes a transparent plate, a plurality of sensors coupled to a first side of the transparent plate, and a plurality of contact pads coupled to an opposing second side of the transparent plate.

Abstract: A window-type structural panel has a glass outer panel bonded to a core panel consisting of an aluminum honeycomb core having outer and inner skin surfaces of resin impregnated fiberglass having substantially the same coefficient of thermal expansion as the aluminum honeycomb core. Design and color effects are imparted to the glass panel by film sheets, printing on adhesive layers, physical insertion of wire, cloth or other solid materials bonded in position by heat and pressure to form a uniform rigid structure of great strength and a light weight.