Patents by Inventor Peter R. Hagerty

Peter R. Hagerty has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Chemically amplified positive photoresists
    Patent number: 6300035
    Abstract: Photoresist compositions are provided comprising 1) a resin binder having photoacid-labile groups, 2) an acid generator and 3) a photospeed control agent. Photoresists of the invention exhibit good photospeed and can provide highly resolved relief images of small dimensions, including lines of sub-micron and sub-half micron dimensions with at least essentially vertical side walls. Methods are also provided that include control of photospeed of a photoresist composition of the invention.
    Type: Grant
    Filed: August 4, 1998
    Date of Patent: October 9, 2001
    Assignees: Shipley Company, L.L.C., International Business Machines Corporation
    Inventors: James W. Thackeray, Peter R. Hagerty, James F. Cameron, Wu-Song Huang, Ahmad D. Katnani, Willard E. Conley
  • Chemically amplified positive photoresists
    Patent number: 5879856
    Abstract: Photoresist compositions are provided comprising 1) a resin binder having photoacid-labile groups, 2) an acid generator and 3) a photospeed control agent. Photoresists of the invention exhibit good photospeed and can provide highly resolved relief images of small dimensions, including lines of sub-micron and sub-half micron dimensions with at least essentially vertical side walls. Methods are also provided that include control of photospeed of a photoresist composition of the invention.
    Type: Grant
    Filed: December 5, 1995
    Date of Patent: March 9, 1999
    Assignee: Shipley Company, L.L.C.
    Inventors: James W. Thackeray, Peter R. Hagerty