Patents by Inventor Peter Ramvall

Peter Ramvall has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11984315
    Abstract: Structures and methods of forming the same are provided. A structure according to the present disclosure includes an interconnect structure, an aluminum oxide layer over the interconnect structure, and a transistor formed over the aluminum oxide layer. The transistor includes cuprous oxide.
    Type: Grant
    Filed: April 12, 2021
    Date of Patent: May 14, 2024
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Marcus Johannes Henricus van Dal, Peter Ramvall
  • Publication number: 20220278203
    Abstract: The current disclosure describes a vertical tunnel FET device including a vertical P-I-N heterojunction structure of a P-doped nanowire gallium nitride source/drain, an intrinsic InN layer, and an N-doped nanowire gallium nitride source/drain. A high-K dielectric layer and a metal gate wrap around the intrinsic InN layer.
    Type: Application
    Filed: May 18, 2022
    Publication date: September 1, 2022
    Inventors: Peter Ramvall, Matthias Passlack
  • Patent number: 11355590
    Abstract: The current disclosure describes a vertical tunnel FET device including a vertical P-I-N heterojunction structure of a P-doped nanowire gallium nitride source/drain, an intrinsic InN layer, and an N-doped nanowire gallium nitride source/drain. A high-K dielectric layer and a metal gate wrap around the intrinsic InN layer.
    Type: Grant
    Filed: March 31, 2020
    Date of Patent: June 7, 2022
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Peter Ramvall, Matthias Passlack
  • Publication number: 20220173102
    Abstract: The present disclosure describes a semiconductor structure that includes a substrate from an undoped semiconductor material and a fin disposed on the substrate. The fin includes a non-polar top surface and two opposing first and second polar sidewall surfaces. The semiconductor structure further includes a polarization layer on the first polar sidewall surface, a doped semiconductor layer on the polarization layer, a dielectric layer on the doped semiconductor layer and on the second polar sidewall surface, and a gate electrode layer on the dielectric layer and the first polarized sidewall surface.
    Type: Application
    Filed: February 17, 2022
    Publication date: June 2, 2022
    Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Matthias PASSLACK, Gerben DOORNBOS, Peter RAMVALL
  • Patent number: 11257818
    Abstract: The present disclosure describes a semiconductor structure that includes a substrate from an undoped semiconductor material and a fin disposed on the substrate. The fin includes a non-polar top surface and two opposing first and second polar sidewall surfaces. The semiconductor structure further includes a polarization layer on the first polar sidewall surface, a doped semiconductor layer on the polarization layer, a dielectric layer on the doped semiconductor layer and on the second polar sidewall surface, and a gate electrode layer on the dielectric layer and the first polarized sidewall surface.
    Type: Grant
    Filed: March 14, 2019
    Date of Patent: February 22, 2022
    Inventors: Matthias Passlack, Gerben Doornbos, Peter Ramvall
  • Patent number: 11164939
    Abstract: A device includes a first epitaxial layer, a second epitaxial layer, an interlayer, a gate dielectric layer, and a gate layer. The interlayer is between the first epitaxial layer and the second epitaxial layer. The gate dielectric layer is around the interlayer. The gate layer is around the gate dielectric layer and the interlayer. The interlayer is slanted with respect to a sidewall of the gate layer.
    Type: Grant
    Filed: June 27, 2018
    Date of Patent: November 2, 2021
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Peter Ramvall, Gerben Doornbos, Matthias Passlack
  • Publication number: 20210257212
    Abstract: Structures and methods of forming the same are provided. A structure according to the present disclosure includes an interconnect structure, an aluminum oxide layer over the interconnect structure, and a transistor formed over the aluminum oxide layer. The transistor includes cuprous oxide.
    Type: Application
    Filed: April 12, 2021
    Publication date: August 19, 2021
    Inventors: Marcus Johannes Henricus van Dal, Peter Ramvall
  • Patent number: 10978292
    Abstract: Structures and methods of forming the same are provided. A structure according to the present disclosure includes an interconnect structure, an aluminum oxide layer over the interconnect structure, and a transistor formed over the aluminum oxide layer. The transistor includes cuprous oxide.
    Type: Grant
    Filed: October 30, 2019
    Date of Patent: April 13, 2021
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Marcus Johannes Henricus van Dal, Peter Ramvall
  • Patent number: 10923581
    Abstract: A method for manufacturing a semiconductor structure including forming a first type semiconductor layer. The method also includes forming a semiconductor interlayer over the first type semiconductor layer. The method further includes forming a second type semiconductor layer over the semiconductor interlayer. The method further includes etching the first type semiconductor layer, the semiconductor interlayer, and the second type semiconductor layer to form a fin structure. The method further includes oxidizing the semiconductor interlayer.
    Type: Grant
    Filed: November 26, 2019
    Date of Patent: February 16, 2021
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Gerben Doornbos, Peter Ramvall, Matthias Passlack, Carlos H. Diaz
  • Patent number: 10868154
    Abstract: A method includes forming a first epitaxial layer having a first dopant over a substrate; etching the first epitaxial layer to form a fin with a polar sidewall; and forming in sequence a semiconductor interlayer and a second epitaxial layer to surround the fin, in which the second epitaxial layer has a second dopant with a different conductivity type than the first dopant.
    Type: Grant
    Filed: December 23, 2019
    Date of Patent: December 15, 2020
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Peter Ramvall, Matthias Passlack, Gerben Doornbos
  • Publication number: 20200381353
    Abstract: Structures and methods of forming the same are provided. A structure according to the present disclosure includes an interconnect structure, an aluminum oxide layer over the interconnect structure, and a transistor formed over the aluminum oxide layer. The transistor includes cuprous oxide.
    Type: Application
    Filed: October 30, 2019
    Publication date: December 3, 2020
    Inventors: Marcus Johannes Henricus van Dal, Peter Ramvall
  • Publication number: 20200227524
    Abstract: The current disclosure describes a vertical tunnel FET device including a vertical P-I-N heterojunction structure of a P-doped nanowire gallium nitride source/drain, an intrinsic InN layer, and an N-doped nanowire gallium nitride source/drain. A high-K dielectric layer and a metal gate wrap around the intrinsic InN layer.
    Type: Application
    Filed: March 31, 2020
    Publication date: July 16, 2020
    Inventors: Peter Ramvall, Matthias Passlack
  • Publication number: 20200135906
    Abstract: A method includes forming a first epitaxial layer having a first dopant over a substrate; etching the first epitaxial layer to form a fin with a polar sidewall; and forming in sequence a semiconductor interlayer and a second epitaxial layer to surround the fin, in which the second epitaxial layer has a second dopant with a different conductivity type than the first dopant.
    Type: Application
    Filed: December 23, 2019
    Publication date: April 30, 2020
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Peter RAMVALL, Matthias PASSLACK, Gerben DOORNBOS
  • Patent number: 10636878
    Abstract: The current disclosure describes a vertical tunnel FET device including a vertical P-I-N heterojunction structure of a P-doped nanowire gallium nitride source/drain, an intrinsic InN layer, and an N-doped nanowire gallium nitride source/drain. A high-K dielectric layer and a metal gate wrap around the intrinsic InN layer.
    Type: Grant
    Filed: May 18, 2018
    Date of Patent: April 28, 2020
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Peter Ramvall, Matthias Passlack
  • Publication number: 20200105760
    Abstract: The present disclosure describes a semiconductor structure that includes a substrate from an undoped semiconductor material and a fin disposed on the substrate. The fin includes a non-polar top surface and two opposing first and second polar sidewall surfaces. The semiconductor structure further includes a polarization layer on the first polar sidewall surface, a doped semiconductor layer on the polarization layer, a dielectric layer on the doped semiconductor layer and on the second polar sidewall surface, and a gate electrode layer on the dielectric layer and the first polarized sidewall surface.
    Type: Application
    Filed: March 14, 2019
    Publication date: April 2, 2020
    Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Matthias Passlack, Gerben Doornbos, Peter Ramvall
  • Publication number: 20200098898
    Abstract: A method for manufacturing a semiconductor structure including forming a first type semiconductor layer. The method also includes forming a semiconductor interlayer over the first type semiconductor layer. The method further includes forming a second type semiconductor layer over the semiconductor interlayer. The method further includes etching the first type semiconductor layer, the semiconductor interlayer, and the second type semiconductor layer to form a fin structure. The method further includes oxidizing the semiconductor interlayer.
    Type: Application
    Filed: November 26, 2019
    Publication date: March 26, 2020
    Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Gerben DOORNBOS, Peter RAMVALL, Matthias PASSLACK, Carlos H. DIAZ
  • Publication number: 20200006473
    Abstract: A device includes a first epitaxial layer, a second epitaxial layer, an interlayer, a gate dielectric layer, and a gate layer. The interlayer is between the first epitaxial layer and the second epitaxial layer. The gate dielectric layer is around the interlayer. The gate layer is around the gate dielectric layer and the interlayer. The interlayer is slanted with respect to a sidewall of the gate layer.
    Type: Application
    Filed: June 27, 2018
    Publication date: January 2, 2020
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Peter RAMVALL, Gerben DOORNBOS, Matthias PASSLACK
  • Patent number: 10516039
    Abstract: A tunnel field-effect transistor (TFET), comprising a first source/drain layer comprising a first polar sidewall; a second source/drain layer surrounding the first source/drain layer, wherein the second source/drain layer and the first source/drain layer are of opposite conductivity types; and a semiconductor interlayer between the second source/drain layer and first polar sidewall of the first source/drain layer.
    Type: Grant
    Filed: June 13, 2018
    Date of Patent: December 24, 2019
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Peter Ramvall, Matthias Passlack, Gerben Doornbos
  • Patent number: 10505025
    Abstract: A device includes a first semiconductor layer, a second semiconductor layer, and an intrinsic semiconductor layer. The second semiconductor layer is over the first semiconductor layer. The first semiconductor layer and the second semiconductor layer are of opposite conductivity types. The second semiconductor layer includes a first sidewall and a second sidewall substantially perpendicular to and larger than the first sidewall. The intrinsic semiconductor layer is in contact with the second sidewall of the second semiconductor layer and the first semiconductor layer.
    Type: Grant
    Filed: August 2, 2018
    Date of Patent: December 10, 2019
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Gerben Doornbos, Peter Ramvall, Matthias Passlack, Carlos H. Diaz
  • Publication number: 20190355818
    Abstract: The current disclosure describes a vertical tunnel FET device including a vertical P-I-N heterojunction structure of a P-doped nanowire gallium nitride source/drain, an intrinsic InN layer, and an N-doped nanowire gallium nitride source/drain. A high-K dielectric layer and a metal gate wrap around the intrinsic InN layer.
    Type: Application
    Filed: May 18, 2018
    Publication date: November 21, 2019
    Inventors: Peter Ramvall, Matthias Passlack