Patents by Inventor Petrus Adrianus Theodorus Maria Ruijs

Petrus Adrianus Theodorus Maria Ruijs has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Reflective optical element for a radiation beam
    Patent number: 11237491
    Abstract: A system comprises a reflective optical element with a reflective surface that is configured to reflect a radiation beam. The reflective optical element also has a body. The system includes a thermal conditioning mechanism operative to thermally induce a deformation of the body under control of a controller. By means of controllably deforming the body, the shape of the reflective surface can be adjusted in a controlled manner.
    Type: Grant
    Filed: April 10, 2019
    Date of Patent: February 1, 2022
    Assignee: ASML Netherlands B.V.
    Inventors: Ramon Mark Hofstra, Andrey Sergeevich Tychkov, Francois Charles Dominique Deneuville, Gerardus Hubertus Petrus Maria Swinkels, Petrus Adrianus Theodorus Maria Ruijs
  • Reflective Optical Element for a Radiation Beam
    Publication number: 20210165336
    Abstract: A system comprises a reflective optical element with a reflective surface that is configured to reflect a radiation beam. The reflective optical element also has a body. The system includes a thermal conditioning mechanism operative to thermally induce a deformation of the body under control of a controller. By means of controllably deforming the body, the shape of the reflective surface can be adjusted in a controlled manner.
    Type: Application
    Filed: April 10, 2019
    Publication date: June 3, 2021
    Applicant: ASML Netherlands B.V.
    Inventors: Ramon Mark HOFSTRA, Andrey Sergeevich TYCHKOV, Francois Charles Dominique DENEUVILLE, Gerardus Hubertus Petrus Maria SWINKELS, Petrus Adrianu Theodorus Maria RUIJS