Patents by Inventor Petrus Carolus Johannes Graat

Petrus Carolus Johannes Graat has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Apparatus for Monitoring a Lithographic Patterning Device
    Publication number: 20140340663
    Abstract: A lithographic patterning device deformation monitoring apparatus (38) comprising a radiation source (40), an imaging device (42), and a processor (50). The radiation source being configured to direct a plurality of beams of radiation (41) with a predetermined diameter towards a lithographic patterning device (MA) such that they are reflected by the patterning device. The imaging detector configured to detect spatial positions of the radiation beams (41?) after they have been reflected by the patterning device. The processor configured to monitor the spatial positions of the radiation beams and thereby determine the presence of a patterning device deformation. The imaging detector has an collection angle which is smaller than a minimum angle of diffraction of the radiation beams.
    Type: Application
    Filed: August 21, 2012
    Publication date: November 20, 2014
    Applicant: ASML Netherlands B.V.
    Inventors: Luigi Scaccabarozzi, Vadim Yevgenyevich Banine, Bernardus Antonius Johannes Luttikhuis, Roelof Koole, Hendrikus Jan Wondergem, Petrus Carolus Johannes Graat