Patents by Inventor Philip G. Clark
Philip G. Clark has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 8092707Abstract: The disclosure pertains to compositions and methods for modifying or refining the surface of a wafer suited for semiconductor fabrication. The compositions include working liquids useful in modifying a surface of a wafer suited for fabrication of a semiconductor device. In some embodiments, the working liquids are aqueous solutions of initial components substantially free of loose abrasive particles, the components including water, a surfactant, and a pH buffer exhibiting at least one pKa greater than 7. In certain embodiments, the pH buffer includes a basic pH adjusting agent and an acidic complexing agent, and the working liquid exhibits a pH from about 7 to about 12. In further embodiments, the disclosure provides a fixed abrasive article comprising a surfactant suitable for modifying the surface of a wafer, and a method of making the fixed abrasive article. Additional embodiments describe methods that may be used to modify a wafer surface.Type: GrantFiled: August 15, 2007Date of Patent: January 10, 2012Assignee: 3M Innovative Properties CompanyInventors: L. Charles Hardy, Heather K. Kranz, Thomas E. Wood, David A. Kaisaki, John J. Gagliardi, John C. Clark, Patricia M. Savu, Philip G. Clark
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Publication number: 20100243471Abstract: A composition for use in polishing a wafer is disclosed. The composition includes an aqueous solution of initial components substantially free of loose abrasive particles and having a pH in the range of about 2 to 7, the aqueous solution including at least one polyelectrolyte and a surfactant. In certain embodiments, the wafer polishing composition can be adjusted to control cut rate and selectivity for modifying semiconductor wafers using a fixed abrasive Chemical Mechanical Polishing (CMP) process. Also disclosed is a CMP method and a process for polishing a wafer using the polishing composition.Type: ApplicationFiled: August 25, 2008Publication date: September 30, 2010Applicant: 3M INNOVATIVE PROPERTIES COMPANYInventors: Naichao Li, John J. Gagliardi, Philip G. Clark, Patricia M. Savu
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Publication number: 20100160458Abstract: A method of making a composition comprises independently providing a first component comprising a first compound, and a second components comprising a second compound; and combining the first component and the second component, wherein: a) the first compound is represented by and b) the second compound is represented by Rf represents a perfluoroalkyl group having from 1 to 12 carbon atoms. R1, R2, R3, and R4 each independently represent H or an alkyl group having from 1 to 6 carbon atoms. R5 represents H, an alkyl group having from 1 to 6 carbon atoms, or a hydroxyalkyl group having from 1 to 6 carbon atoms. R6 and R7 each independently represent an alkyl group having from 1 to 6 carbon atoms, or a hydroxyalkyl group having from 1 to 6 carbon atoms. Compositions preparable according to the method are also disclosed.Type: ApplicationFiled: November 25, 2009Publication date: June 24, 2010Inventors: Patricia M. Savu, Philip G. Clark, Michael J. Parent, Jason M. Kehren
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Patent number: 7614852Abstract: A blade is disclosed for use in a wind turbine, with the blade having a longitudinal axis for extending radially outwardly from a center of rotation of the blade on the wind turbine. The blade has a front side with a front surface for orienting in a windward direction and a rear side with a rear surface for orienting in a leeward direction. The blade has a profile taken in a plane oriented substantially perpendicular to the longitudinal axis of the blade. The profile of the blade has a leading edge and a trailing edge. The profile is characterized by a camber ratio, and the camber ratio of the profile is greater than or equal to approximately 4%.Type: GrantFiled: December 24, 2007Date of Patent: November 10, 2009Inventor: Philip G. Clark
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Publication number: 20090257884Abstract: A blade is disclosed for use in a wind turbine, with the blade having a longitudinal axis for extending radially outwardly from a center of rotation of the blade on the wind turbine. The blade has a front side with a front surface for orienting in a windward direction and a rear side with a rear surface for orienting in a leeward direction. The blade has a profile taken in a plane oriented substantially perpendicular to the longitudinal axis of the blade. The profile of the blade has a leading edge and a trailing edge. The profile is characterized by a camber ratio, and the camber ratio of the profile is greater than or equal to approximately 4%.Type: ApplicationFiled: June 24, 2009Publication date: October 15, 2009Inventor: PHILIP G. CLARK
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Publication number: 20090160194Abstract: A blade is disclosed for use in a wind turbine, with the blade having a longitudinal axis for extending radially outwardly from a center of rotation of the blade on the wind turbine. The blade has a front side with a front surface for orienting in a windward direction and a rear side with a rear surface for orienting in a leeward direction. The blade has a profile taken in a plane oriented substantially perpendicular to the longitudinal axis of the blade. The profile of the blade has a leading edge and a trailing edge. The profile is characterized by a camber ratio, and the camber ratio of the profile is greater than or equal to approximately 4%.Type: ApplicationFiled: December 24, 2007Publication date: June 25, 2009Inventor: Philip G. Clark
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Publication number: 20090029274Abstract: A method of removing contamination from a substrate having an ion-implanted region is described. The method comprises applying a composition comprising a fluorinated solvent and a co-solvent to the substrate in an amount sufficient to assist in the removal of contamination from the substrate. As contaminant is removed, metal patterns or other desired features on the substrate remain. Additionally, the composition for removing contamination is not harmful to the user or the substrate (i.e., non-flammable and/or non caustic).Type: ApplicationFiled: July 25, 2007Publication date: January 29, 2009Inventors: Erik D. Olson, Philip G. Clark
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Patent number: 7425505Abstract: The present invention provides improvements to the use of silyating agents in semiconductor processing. More particularly, the silyating agents may be provided in combination with a substantially non-flammable ether, so that the combination is substantially non-flammable. Additionally, the silyating agent may be utilized in vapor form, or applied in conjunction with the electromagnetic radiation. Each of these embodiments can enhance the usability of the silyating agent, i.e., by rendering the silyating agent more safe, more easily utilized in a variety of processing equipment and/or by enhancing the passivation efficacy/efficiency of the silyating agent.Type: GrantFiled: July 19, 2004Date of Patent: September 16, 2008Assignee: FSI International, Inc.Inventors: Philip G. Clark, Kurt Karl Christenson, Brent D. Schwab
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Patent number: 6044965Abstract: A troughing idler of an enclosed belt conveyor has a horizontal shaft that is supported by antifriction bearings mounted outside of the side walls of the trunking and carries a medial roller. Each of the side walls of the trunking supports a downwardly and inwardly sloping side roller in cantilevered relation by means of a side roller carrier that is mounted on the side wall and includes a spindle, a hub, and inboard and outboard antifriction bearings interposed between the spindle and the hub. The medial roller and the side rollers are arranged relative to each other so as to support the belt with side portions sloping upwardly and outwardly with respect to a medial portion.Type: GrantFiled: February 18, 1998Date of Patent: April 4, 2000Inventor: Philip G. Clark
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Patent number: 6039170Abstract: An enclosed movable tripper belt conveyor includes an elongated trunking having an endless conveyor belt carried by troughing idlers along an upper path leading from a tail pulley to a head pulley. The belt returns from the head pulley to the tail pulley in sliding contact with a floor of the trunking. A movable tripper unit includes a tripper that discharges the material being conveyed to a valve that is configured and arranged to selectively discharge the material to one side or the other of the movable tripper unit. A cover is received over the trunking and the movable tripper unit so as to form with the trunking an enclosure containing the belt, the tail pulley, the head pulley, all of the troughing idlers and the movable tripper unit.Type: GrantFiled: February 18, 1998Date of Patent: March 21, 2000Inventor: Philip G. Clark
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Patent number: 5526922Abstract: A belt type conveyor includes buckets which include front and rear forward angling walls for nesting. The front walls act as a retaining wall and a pour chute for discharging material at the correct time and location. The buckets may also include rear portions which direct material falling onto the rear portion into the next bucket. The rear portions may also include a wear block mounted at the top of the rear wall for preventing wear on the remaining portions of the bucket. The buckets may include flanges extending on either side, which ride under bogies for maintaining proper tension and for following the correct desired path of the conveyor.Type: GrantFiled: June 23, 1994Date of Patent: June 18, 1996Inventor: Philip G. Clark
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Patent number: 4230222Abstract: A conveyor assembly for moving particulate material such as grain on a conveyor belt. The conveyor assembly includes a tail section, one or more intermediate sections according to the needed length, and a head section. The head section contains a powered drive pulley. The tail section contains a tail pulley. An endless conveyor belt is trained between the tail pulley and the drive pulley. Each intermediate section carries at least one roller for carrying the forward run of the conveyor belt. The intermediate section rollers have a contoured, concave surface to support the conveyor belt with a dish-shaped or concave profile such that material is held on the conveyor belt and inhibited from spilling over the sides. The tail pulley is mounted in a tail pulley shroud having a funnel-shaped outlet directed toward the forward run of the conveyor belt.Type: GrantFiled: January 22, 1979Date of Patent: October 28, 1980Inventor: Philip G. Clark