Patents by Inventor Philip Tuley

Philip Tuley has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Methods and apparatus for reducing byproduct particle generation in a plasma processing chamber
    Patent number: 5916454
    Abstract: A method for increasing mean time between cleans (MTBC) for a plasma processing chamber configured for running a process. The method includes specifying a minimum roughness specification for a finish of a surface of a chamber interior part configured for use within the plasma processing chamber. The minimum roughness specification is selected to promote adhesion of byproduct particles produced by the process to the surface. The method further includes specifying a maximum roughness specification for a finish of a surface of a chamber interior part. The maximum roughness specification is selected to facilitate ease of cleaning of the byproduct particles using a wet clean process. The method also includes having the chamber interior part manufactured in accordance with the minimum roughness specification and the maximum roughness specification.
    Type: Grant
    Filed: August 30, 1996
    Date of Patent: June 29, 1999
    Assignee: Lam Research Corporation
    Inventors: Brett C. Richardson, Merrill D. Crapse, Philip Tuley