Abstract: A valve plate for a closure device for closing an opening in a vacuum-tight manner. A front side of the valve plate has a seal ring for sealing to the wall, and the rear side has a depression for connecting to a valve rod. In regions of two mutually opposite lateral walls of the depression, an extension adjoins in each depression. For each respective extension a threaded bore is present, which on a lateral wall thereof opens into the extension. The valve rod is connectable to the valve plate by a respective retaining bolt screwed into the respective threaded bore and via an end portion that protrudes from the threaded bore into the extension, with the end portion interacting with a groove on a connecting part connected to the valve rod end, or at the valve rod end is configured integral to the latter.

Abstract: A vacuum valve (1) for loading and/or unloading a vacuum chamber (2). The vacuum valve has a closure plate (3) that is pressed against a valve seat (4) when in a closed position to seal a loading opening (5) and being raised from the valve seat (4) when in an open position, exposing the loading opening (5) for loading and/or unloading the vacuum chamber (2). The vacuum valve has at least one drive (6) for moving the closure plate (3) back and forth between the open and closed positions, the closure plate (3) being held by at least one guide (7) on at least one plate holder (8) of the drive (6). The vacuum valve has at least one elastic preload body (9), with the closure plate (3) being movable against a preload of the elastic preload body (9) along the guide (7) relative to the plate holder (8).

Abstract: A vacuum valve (1) for loading and/or unloading a vacuum chamber (2). The vacuum valve has a closure plate (3) that is pressed against a valve seat (4) when in a closed position to seal a loading opening (5) and being raised from the valve seat (4) when in an open position, exposing the loading opening (5) for loading and/or unloading the vacuum chamber (2). The vacuum valve has at least one drive (6) for moving the closure plate (3) back and forth between the open and closed positions, the closure plate (3) being held by at least one guide (7) on at least one plate holder (8) of the drive (6). The vacuum valve has at least one elastic preload body (9), with the closure plate (3) being movable against a preload of the elastic preload body (9) along the guide (7) relative to the plate holder (8).