Patents by Inventor Philllip Stout

Philllip Stout has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method to control the gate sidewall profile by graded material composition
    Publication number: 20070166902
    Abstract: A semiconductor process and apparatus uses a predetermined sequence of patterning and etching steps to etch a gate stack (30, 32) formed over a substrate (36), thereby forming an etched gate (33) having a vertical sidewall profile (35). By constructing the gate stack (30, 32) with a graded material composition of silicon-based layers, the composition of which is selected to counteract the etching tendencies of the predetermined sequence of patterning and etching steps, a more idealized vertical gate sidewall profile (35) may be obtained.
    Type: Application
    Filed: January 13, 2006
    Publication date: July 19, 2007
    Inventors: Marius Orlowski, Olubunmi Adetutu, Philllip Stout