Patents by Inventor Phuc Hong NINH

Phuc Hong NINH has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Substrate processing apparatus
    Patent number: 10620648
    Abstract: Examples of an insulation system include a digital isolator for receiving supply of a first power supply on an input side thereof and receiving supply of a second power supply on an output side thereof, and an output adjusting unit for receiving supply of the second power supply, directly outputting an output of the digital isolator when a voltage of the second power supply is larger than a predetermined voltage, and stopping data output irrespective of the output of the digital isolator when the voltage of the second power supply is smaller or equal to the predetermined voltage.
    Type: Grant
    Filed: May 23, 2019
    Date of Patent: April 14, 2020
    Assignee: ASM IP Holding B.V.
    Inventors: Phuc Hong Ninh, Tsutomu Makino
  • Preventive maintenance system and preventive maintenance method
    Patent number: 10521774
    Abstract: A preventive maintenance system includes a sensor attached to a movable part, and a preventive maintenance device which accumulates data on the operation of the movable part detected with the sensor, detects an indication of a malfunction of the movable part from a correlation between the operation data and a malfunction mode of the movable part, and notifies an operator of an indication of the malfunction when the indication of the malfunction of the movable part is found, or orders a replacement part for a component part which is a cause of the indication of the malfunction.
    Type: Grant
    Filed: March 22, 2016
    Date of Patent: December 31, 2019
    Assignee: ASM IP Holding B.V.
    Inventors: Hanako Komine, Phuc Hong Ninh
  • SUBSTRATE PROCESSING APPARATUS
    Publication number: 20190346868
    Abstract: Examples of an insulation system include a digital isolator for receiving supply of a first power supply on an input side thereof and receiving supply of a second power supply on an output side thereof, and an output adjusting unit for receiving supply of the second power supply, directly outputting an output of the digital isolator when a voltage of the second power supply is larger than a predetermined voltage, and stopping data output irrespective of the output of the digital isolator when the voltage of the second power supply is smaller or equal to the predetermined voltage.
    Type: Application
    Filed: May 23, 2019
    Publication date: November 14, 2019
    Applicant: ASM IP Holding B.V.
    Inventors: Phuc Hong NINH, Tsutomu MAKINO
  • Insulation system and substrate processing apparatus
    Patent number: 10345832
    Abstract: Examples of an insulation system include a digital isolator for receiving supply of a first power supply on an input side thereof and receiving supply of a second power supply on an output side thereof, and an output adjusting unit for receiving supply of the second power supply, directly outputting an output of the digital isolator when a voltage of the second power supply is larger than a predetermined voltage, and stopping data output irrespective of the output of the digital isolator when the voltage of the second power supply is smaller or equal to the predetermined voltage.
    Type: Grant
    Filed: May 14, 2018
    Date of Patent: July 9, 2019
    Assignee: ASM IP Holding B.V.
    Inventors: Phuc Hong Ninh, Tsutomu Makino
  • PREVENTIVE MAINTENANCE SYSTEM AND PREVENTIVE MAINTENANCE METHOD
    Publication number: 20170278074
    Abstract: A preventive maintenance system includes a sensor attached to a movable part, and a preventive maintenance device which accumulates data on the operation of the movable part detected with the sensor, detects an indication of a malfunction of the movable part from a correlation between the operation data and a malfunction mode of the movable part, and notifies an operator of an indication of the malfunction when the indication of the malfunction of the movable part is found, or orders a replacement part for a component part which is a cause of the indication of the malfunction.
    Type: Application
    Filed: March 22, 2016
    Publication date: September 28, 2017
    Applicant: ASM IP Holding B.V.
    Inventors: Hanako KOMINE, Phuc Hong NINH