Abstract: Automatic test equipment for semiconductor devices with low cost, easy to use software for developing and executing test programs. The tester is controlled with a computer work station running a commercially available spread sheet program. The commercially available spread sheet program is set as an application to provide a program development environment. In addition, programs made with the commercially available spread sheet program control the execution of tests on semiconductor devices. The tester is easy to program because use of the commercially available spread sheet program generates well known programming interfaces. In this way, the commercially available spread sheet program implements the software controlling the tester rather than merely providing spread sheet functions used by the application. The software controlling the automatic test equipment is therefore very easy to program or modify. It is also very easy to program.