Abstract: A method of controlling the molecular weight of poly(cyclic) olefin (norbornene-type) polymers and activating the polymerization thereof with a single material is provided. Such method include adding a chain transfer/activating agent to a mixture of monomer(s), catalyst, solvent and an optional cocatalyst and polymerizing the mixture to form a polymer. It is shown that the amount of chain transfer/activating agent in the mixture can serve to control the molecular weight of the resulting polymer, its percent conversion or both, and in some embodiments the optical density of the resulting polymer.

Abstract: Embodiments of the present invention relate generally to non-self imageable and imageable norbornene-type polymers useful for immersion lithographic processes, methods of making such polymers, compositions employing such polymers and the immersion lithographic processes that make use of such compositions. More specifically the embodiments of the present invention are related to norbornene-type polymers useful for forming imaging layer and top-coat layers for overlying such imaging layers in immersion lithographic process and the process thereof.

Abstract: Embodiments of the present invention relate generally to non-self imageable and imageable norbornene-type polymers useful for immersion lithographic processes, methods of making such polymers, compositions employing such polymers and the immersion lithographic processes that make use of such compositions. More specifically the embodiments of the present invention are related to norbornene-type polymers useful for forming imaging layer and top-coat layers for overlying such imaging layers in immersion lithographic process and the process thereof.

Abstract: The method of the present invention is a microwave bond cleavage of a first hydrocarbon compound, the first hydrocarbon compound in a liquid phase and substantially non-aqueous, to a second compound having a shorter carbon chain than the first hydrocarbon compound. The method has the steps of exposing a combination of the first hydrocarbon compound with a supported catalyst having a carrier of a non-metallic amorphous solid with at least one catalytic metal dispersed therein to microwave energy thereby converting the first hydrocarbon compound into the second hydrocarbon compound, and recovering the second hydrocarbon compound. Advantages of the present invention include use of a low cost supported catalyst at ambient temperature and pressure.