Abstract: A method of fabricating PMOS devices with embedded SiGe is disclosed. Prior to the selective epitaxial growth of SiGe, Ge element is implanted to the source/drain recesses and an annealing process is performed to form a strained SiGe alloy layer. Then, the strained SiGe alloy layer is used as a base layer on which another strained SiGe alloy layer is grown continually by an selective epitaxy process, so as to avoid a direct contact between the epitaxially grown strained SiGe alloy layer and the silicon substrate and reduce the defects formed at the SiGe/Si interfaces. Therefore, the stress can be applied to the PMOS channel regions without causing junction current leakage due to the defects at the SiGe/Si interfaces, which enhances the electrical performance of the PMOS devices. The fabrication method is also compatible with the conventional CMOS process.

Abstract: A MEMS microphone structure, comprising a semiconductor substrate having a cavity, a first dielectric layer having a through-hole communicating with the cavity, a lower diaphragm electrode formed above the through-hole and at least partially attached to the upper surface of the first dielectric layer, and an upper electrode structure with an insulating layer. The upper electrode structure comprises an annular supporter, a back plate having multiple holes, and an upper electrode connection. At least a part of the annular supporter extends downwardly to the lower diaphragm electrode while the rest of the annular supporter extends downwardly to the substrate. The back plate is suspended above the lower diaphragm electrode by the annular supporter, forming an air gap therebetween. An upper electrode is embedded in the insulating layer at the back plate and is lead out by the upper electrode connection.

Abstract: A method is provided for manufacturing a semiconductor device with a metal film resistor structure. The method includes providing an insulation layer on the semiconductor device. A lower copper interconnect is formed in the insulation layer. The method also includes forming a cap layer on the insulation layer and the lower copper interconnect and etching the cap layer based on a single photolithography mask to form a window exposing portion of the lower copper interconnect and portion of the insulation layer. Further, the method includes forming a metal film layer on the cap layer and inside the window such that exposed portion of the lower copper interconnect is connected with part of the metal film layer within the window. The method also includes performing a chemical mechanical polishing (CMP) process to form a metal film resistor based on the metal film layer. The metal film resistor is connected with the portion of the lower copper interconnect.

Abstract: A method for repairing damages to sidewalls of an ultra-low dielectric constant film is disclosed by the present invention comprises the following steps: depositing an ultra-low dielectric constant film on an semiconductor substrate; dry-etching the ultra-low dielectric constant film to form a sidewall structure thereof; performing wet cleaning by using a chemical agent containing an unsaturated hydrocarbon having —O—C(Re)x; and performing ultraviolet curing. The present invention can restore pores size and porosity of the ultra-low dielectric constant film, and to keep effective dielectric constant to a minimum.

Abstract: A method for repairing damages to sidewalls of an ultra-low dielectric constant film is disclosed by the present invention comprises the following steps: depositing an ultra-low dielectric constant film on an semiconductor substrate; dry-etching the ultra-low dielectric constant film to form a sidewall structure thereof; performing wet cleaning by using a chemical agent containing an unsaturated hydrocarbon having —O—C(Re)x; and performing ultraviolet curing. The present invention can restore pores size and porosity of the ultra-low dielectric constant film, and to keep effective dielectric constant to a minimum.

Abstract: A method is provided for manufacturing a semiconductor device with a metal film resistor structure. The method includes providing an insulation layer on the semiconductor device. A lower copper interconnect is formed in the insulation layer. The method also includes forming a cap layer on the insulation layer and the lower copper interconnect and etching the cap layer based on a single photolithography mask to form a window exposing portion of the lower copper interconnect and portion of the insulation layer. Further, the method includes forming a metal film layer on the cap layer and inside the window such that exposed portion of the lower copper interconnect is connected with part of the metal film layer within the window. The method also includes performing a chemical mechanical polishing (CMP) process to form a metal film resistor based on the metal film layer. The metal film resistor is connected with the portion of the lower copper interconnect.

Abstract: One time programming memory and methods of storage and manufacture of the same are provided. Examples relate to microelectronic memory technology and manufacture. The one time programming memory includes a diode (10) having a unidirectional conducting rectification characteristic and a variable-resistance memory (20) having a bipolar conversion characteristic. The diode (10) having the unidirectional conducting rectification characteristic and the variable-resistance memory (20) having the bipolar conversion characteristic are connected in series. The one time programming memory device of this example takes the bipolar variable-resistance memory (20) as a storage unit, programming the bipolar variable-resistance memory (20) into different resistance states so as to carry out multilevel storage, and takes the unidirectional conducting rectification diode (10) as a gating unit.

Abstract: The present invention relates to a one time programming memory and method of storage and manufacture of the same. It belongs to microelectronic memory technology and manufacture field. The one time programming memory comprises a diode (10) having a unidirectional conducting rectification characteristic and a variable-resistance memory (20) having a bipolar conversion characteristic. The diode (10) having the unidirectional conducting rectification characteristic and the variable-resistance memory (20) having the bipolar conversion characteristic are connected in series. The one time programming memory device of the present invention takes the bipolar variable-resistance memory (20) as a storage unit, programming the bipolar variable-resistance memory (20) into different resistance states so as to carry out multilevel storage, and takes the unidirectional conducting rectification diode (10) as a gating unit.