Patents by Inventor Qionglin GAO

Qionglin GAO has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Optical sensor for phase determination
    Patent number: 10837902
    Abstract: An apparatus and a method for in-situ phase determination are provided. The apparatus includes a measurement chamber configured to retain a substance, and an entrance window mounted on a side of the measurement chamber. An exit window is mounted on an opposite side of the measurement chamber, and the exit window is parallel with the entrance window. The apparatus further includes a light source configured to generate an incident light beam. The incident light beam is directed to the entrance window at a non-zero angle of incidence with respect to a normal of the entrance window. The incident light beam passes through the entrance window, the measurement chamber and the exit window to form an output light beam. A detector is positioned under the exit window and configured to collect the output light beam passing through the exit window and generate measurement data.
    Type: Grant
    Filed: August 21, 2018
    Date of Patent: November 17, 2020
    Assignee: Tokyo Electron Limited
    Inventors: Ivan Maleev, Mihail Mihaylov, Hanyou Chu, Ching-Ling Meng, Qionglin Gao, Yan Chen, Xinkang Tian
  • OPTICAL SENSOR FOR PHASE DETERMINATION
    Publication number: 20190056320
    Abstract: An apparatus and a method for in-situ phase determination are provided. The apparatus includes a measurement chamber configured to retain a substance, and an entrance window mounted on a side of the measurement chamber. An exit window is mounted on an opposite side of the measurement chamber, and the exit window is parallel with the entrance window. The apparatus further includes a light source configured to generate an incident light beam. The incident light beam is directed to the entrance window at a non-zero angle of incidence with respect to a normal of the entrance window. The incident light beam passes through the entrance window, the measurement chamber and the exit window to form an output light beam. A detector is positioned under the exit window and configured to collect the output light beam passing through the exit window and generate measurement data.
    Type: Application
    Filed: August 21, 2018
    Publication date: February 21, 2019
    Applicant: Tokyo Electron Limited
    Inventors: Ivan MALEEV, Mihail MIHAYLOV, Hanyou CHU, Ching-Ling MENG, Qionglin GAO, Yan CHEN, Xinkang TIAN