Patents by Inventor R. C. Wang

R. C. Wang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and apparatus for delivering and recycling a bubble-free liquid chemical
    Patent number: 6171367
    Abstract: The present invention discloses a method and apparatus for delivering and recycling a liquid such that a substantially air bubble-free liquid flow can be supplied to a process machine and a liquid flow that contains air bubbles can be recycled back into a liquid reservoir for venting away the air bubbles. The method and apparatus is not only capable of supplying air bubble-free liquid to a process machine, but also capable of saving a costly process liquid from being purged out into a waste tank in order to eliminate air bubbles entrapped in the liquid.
    Type: Grant
    Filed: June 5, 1997
    Date of Patent: January 9, 2001
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd
    Inventors: Ray Peng, T. Y. Liu, Y. F. Lin, R. C. Wang