Patents by Inventor Rafael ALDANA LASO

Rafael ALDANA LASO has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Methods for defect validation
    Patent number: 10859926
    Abstract: A method of defect validation for a device manufacturing process, the method including: obtaining a first image of a pattern processed into an area on a substrate using the device manufacturing process under a first condition; obtaining a metrology image from the area; aligning the metrology image and the first image; and determining from the first image and the metrology image whether the area contains a defect, based on one or more classification criteria.
    Type: Grant
    Filed: May 25, 2016
    Date of Patent: December 8, 2020
    Assignee: ASML Netherlands B.V.
    Inventors: Stefan Hunsche, Rafael Aldana Laso, Vivek Kumar Jain, Marinus Jochemsen, Xinjian Zhou
  • METHODS FOR DEFECT VALIDATION
    Publication number: 20180173104
    Abstract: A method of defect validation for a device manufacturing process, the method including: obtaining a first image of a pattern processed into an area on a substrate using the device manufacturing process under a first condition; obtaining a metrology image from the area; aligning the metrology image and the first image; and determining from the first image and the metrology image whether the area contains a defect, based on one or more classification criteria.
    Type: Application
    Filed: May 25, 2016
    Publication date: June 21, 2018
    Applicant: ASML NETHERLANDS B.V.
    Inventors: Stefan HUNSCHE, Rafael ALDANA LASO, Vivek Kumar JAIN, Marinus JOCHEMSEN, Xinjian ZHOU