Patents by Inventor Raffaele Mucciato

Raffaele Mucciato has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Reactor precoating for reduced stress and uniform CVD
    Patent number: 6974781
    Abstract: A method is provided for obtaining stable and elevated deposition rates in a reaction chamber, following the cleaning of the chamber. The method involves cleaning of the chamber, pre-coating the interior surfaces of the reaction chamber with an inorganic composition, and then, using the pre-coated chamber to deposit an organic layer onto a workpiece.
    Type: Grant
    Filed: October 20, 2003
    Date of Patent: December 13, 2005
    Assignee: ASM International N.V.
    Inventors: Eric A. H. Timmermans, Maarten J. Teepen, Raffaele Mucciato, Rudi Wilhelm
  • METHOD FOR THE DEPOSITION OF SILICON NITRIDE FILMS
    Publication number: 20050085098
    Abstract: A method is provided for obtaining stable and elevated deposition rates in a reaction chamber, following the cleaning of the chamber. The method involves cleaning of the chamber, pre-coating the interior surfaces of the reaction chamber with an inorganic composition, and then, using the pre-coated chamber to deposit an organic layer onto a workpiece.
    Type: Application
    Filed: October 20, 2003
    Publication date: April 21, 2005
    Inventors: Eric Timmermans, Maarten Teepen, Raffaele Mucciato, Rudi Wilhelm