Patents by Inventor Rainer Petersen

Rainer Petersen has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and system for measuring physical parameters with a piezoelectric bimorph cantilever in a gaseous or liquid environment
    Patent number: 7663295
    Abstract: A piezoelectric bimorph cantilever is used for determining physical parameters in a gaseous or liquid environment. The sensor works as a driven and damped oscillator. Contrary to common cantilever sensor systems, the piezoelectric film of the bimorph cantilever acts as both a sensor and an actuator. Using at least two resonance mode of the bimorph cantilever, at least two physical parameters can be measured simultaneously in a gas or a liquid. An optimized piezoelectric cantilever and a method to produce the cantilever are also described.
    Type: Grant
    Filed: December 14, 2006
    Date of Patent: February 16, 2010
    Assignee: IMEC
    Inventors: Vincent Mortet, Rainer Petersen
  • METHOD AND SYSTEM FOR MEASURING PHYSICAL PARAMETERS WITH A PIEZOELECTRIC BIMORPH CANTILEVER IN A GASEOUS OR LIQUID ENVIRONMENT
    Publication number: 20070138909
    Abstract: A piezoelectric bimorph cantilever is used for determining physical parameters in a gaseous or liquid environment. The sensor works as a driven and damped oscillator. Contrary to common cantilever sensor systems, the piezoelectric film of the bimorph cantilever acts as both a sensor and an actuator. Using at least two resonance mode of the bimorph cantilever, at least two physical parameters can be measured simultaneously in a gas or a liquid. An optimized piezoelectric cantilever and a method to produce the cantilever are also described.
    Type: Application
    Filed: December 14, 2006
    Publication date: June 21, 2007
    Applicants: INTERUNIVERSITAIR MICROELEKTRONICA CENTRUM (IMEC), UNIVERSITEIT HASSELT
    Inventors: Vincent Mortet, Rainer Petersen