Abstract: Methods, systems and program products are disclosed for implementing a platform-independent markup language-based GUI format that includes a plurality of markup language-based platform-independent GUI objects. The platform-independent GUI format allows translation to/from any platform-specific GUI format. GUIs can also be shared between platform-specific GUI formats.

Abstract: A software module for use within an integrated circuit fabrication facility sends commands to a tool according to a method that operates with any tool that satisfies SEMI standards to add or subtract steps in a process without reprogramming or recompiling. The program operates autonomously to change parameters of commands that it sends to the tool to improve performance of the fab.

Abstract: A method, system and program product are disclosed for performing automatic testing of a system including a plurality of modules in which at least two modules lack a predetermined communication mechanism. In particular, the invention performs automated testing of such systems by finding and applying a logical correlation on test results for automated generation of a test map. Each test map includes a sequence of test scripts to be run by the modules and/or interface points. The test map generation can be based on test results from previous tests such that the invention learns, improves and obtains more functionality.