Abstract: Described herein are devices and methods for transporting a plurality of palletless product units at a single time. A palletless product handling vehicle comprising two clamping pads capable of being positioned on either side of a plurality of product units maintained in side-by-side relation can be used to transport the product units during manufacturing, distribution, and storage processes. The clamping members can be maintained at a neutral camber, open to a distance of at least 96 inches, and close to a distance of about 28 inches or less. As a result of the camber, the improved mobility of the clamping members, and the improved clamping pads, two or more palletless product units can be transported in side-by-side relation at one time without causing damage or creasing to the product units. Thus, more efficient and cost-effective transportation of product units and product storage can be achieved.

Abstract: A hybrid wafer gyroscope includes a combination of micro-machined components and traditional electromechanical components to form a miniature gyroscope having a high degree of stability. The gyroscope includes a rotor, gimbal, flexures, and stop cutouts micro-machined out of one or more layers of silicon, forming a unitary, planar, and disk-shaped rotor subassembly, which spins about a drive shaft.

Abstract: Trenches which reduce or eliminate force and sensitivity associated with proof mass motion normal to the substrate as a result of voltage transients is disclosed. The trenches provide increased separation between interleaved comb electrodes and the substrate, and thereby also reduce the comb lift to drive ratio. The trenches are typically formed directly below the interleaved comb electrodes, but may also be formed below other suspended portions. Trench depth is from 6-10 microns and provides a comb electrode to substrate separation of approximately 8.5-12.5 microns.

Abstract: A micromechanical contact load force sensor is disclosed. The force sensor comprises an array of capacitive load cells on a substrate. The force sensor is able to sense high loads, on the order on 10.sup.9 N/m.sup.2, and distribute the load over a suitable number of the cells of the array while minimizing crosstalk between adjacent cells. The force sensor is useful in biological and robotic applications.