Abstract: A stylus probe with both a contact sensing and a capacitive proximity sensing capability provided by positioning a capacitive sensor means (10) on the tip-end of a grounded, thin conductive stainless steel tube (12) so that the capacitive sensor means (10) is electrically insulated from the grounded tube, and a conductive lead wire (16), conductively attached to the capacitive sensor means (10), extends through the tube (12) with an electrically insulative material (18) dispersed between the tube (12) and the lead wire (16) to electrically insulate and space the lead wire (16) from the tube (12). The connecting-end of the tube (12) has an elastomer material (20) and (22) placed in an annular fashion and in direct contact with a mounting means and the tube (12) so as to dampen vibrations of the tube (12) caused by probe deflection. The stylus probe further comprises a tubular member with a length:width ratio of from about 40:1 to about 300:1 to give up to a 45.degree.

Abstract: The surface parameters and characteristics of a conductive workpiece are determined by applying a voltage between the workpiece and a capacitance probe having proximity sensing capabilities, and moving the probe in two or three co-ordinate axes relative to the workpiece while measuring the capacitance between the probe and workpiece, and controlling the probe velocity and/or direction within a stand-off band adjacent to the workpiece as a function of the capacitance value measured for purposes of effecting significant real time process controls, and determining the workpiece surface parameters as a function of the probe movement and capacitance measured.

Abstract: A sensor for sensing and quantifying the conformity of a workpiece surface contour to a predetermined design contour. The sensor consists of an array of capacitor elements on a surface having the negative image of the predetermined design contour, against which the workpiece is mated. In operation, each of the capacitor elements and the workpiece are connected to a corresponding oscillator circuit so that the frequency of each circuit is a function of the capacitance between the individual plate element and the workpiece, while the capacitance is a function of the distance between the individual plate element and the workpiece. Hence the overall output of the circuits is a function of the conformity of the workpiece surface contour to the contour or topology of the sensor surface.

Abstract: An arrangement for a tactile sensing system involved in the determination of object shape, contour, orientation and detection of slip finding one use in real time control of robotically manipulated tools. The sensor uses contact between the object and a gripper upon which the sensor is disposed wherein the object surface forms one plate of the sensing electrode.