Abstract: A method of radiating a plurality of masses in a patient is provided, including receiving a three-dimensional model of the patient, the model including respective locations of a plurality of OARs, receiving a set of locations in the model corresponding to the masses, respective prescribed radiation dosages for the masses, and respective radiation limits for the OARs. The method includes computing a candidate set of beams having respective beam paths that travel through at least one of the masses. The method includes scoring the candidate set of beams based on respective dosages provided to the masses, respective dosages provided to the OARs, and beams in a set of selected beams for treatment, adding a best-scoring beam among the candidate set of beams to the set of selected beams, and radiating the masses using the set of selected beams.

Abstract: A filter for filtering radio frequency (RF) power transmitted from an electrostatic chuck (ESC) in a plasma processing system. The plasma processing system may include a heating element disposed at the ESC. The plasma processing system may further include a power supply. The filter may include a core member and a cable wound around and wound along the core member to form a set of inductors. The cable may include a plurality of wires, including a first wire and a second wire, a portion of the first wire and a portion of the second wire being twisted together, a first end of the first wire and a first end of the second wire being connected to the heating element, each of a second end of the first wire and a second end of the second wire being connected to a capacitor and being connected to the power supply.

Abstract: A filter for filtering radio frequency (RF) power transmitted from an electrostatic chuck (ESC) in a plasma processing system. The plasma processing system may include a heating element disposed at the ESC. The plasma processing system may further include a power supply. The filter may include a core member and a cable wound around and wound along the core member to form a set of inductors. The cable may include a plurality of wires, including a first wire and a second wire, a portion of the first wire and a portion of the second wire being twisted together, a first end of the first wire and a first end of the second wire being connected to the heating element, each of a second end of the first wire and a second end of the second wire being connected to a capacitor and being connected to the power supply.