Abstract: An apparatus for producing laminated integrated circuit cubes includes a hermetically sealable oven chamber. At least one conductive heating device is used to heat the cube to a cure temperature. A vacuum source is connected to the oven chamber to remove gas from between the integrated circuit layers prior to curing. A press device applies pressure to the cube while it is heated under vacuum. A cooling gas is circulated through the oven chamber after curing. A cooling fluid can also be circulated through cooling channels in at least one wall of the oven chamber to cool the chamber.

Abstract: A method for producing laminated integrated circuit cubes includes applying conductive heat to the cube using at least one conductive heating device. A vacuum is created around the cube to remove air and other gases from between the integrated circuit layers prior to curing. A force is applied to the cube while it is heated under vacuum. A cooling gas is then circulated over the cube. Temperature and force sensing can be performed, and the process can be controlled by programmable logic controllers and the like.

Abstract: An oven for making laminated integrated circuit cubes includes an oven chamber with at least one access opening. A closure member for the access opening is capable of hermetically sealing the chamber. A hermetic connection is provided for supplying power to within the chamber. Structure permits the withdrawal of air and other gases from within the chamber. Hermetic structure permits the application of a press force to a workpiece within the chamber from an actuator outside the chamber. Hermetic temperature sensing devices measure the temperature of a workpiece within the chamber.

Abstract: An apparatus for applying a force to laminated integrated circuit cubes in an oven chamber includes a force-applying member, an actuator for the force-applying member, and sealing structure for sealing the force-applying member to an opening permitting access by said force-applying member into the oven chamber. The sealing structure has a flexible sleeve, and the force-applying member passes through the sleeve. A first end of the sleeve is hermetically sealed to the force-applying member, and a second end of the sleeve can be hermetically sealed about the opening. The force applying member can move within the opening and the flexible sleeve will flex with this movement.