Patents by Inventor Raman Achutharaman

Raman Achutharaman has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Tailored temperature uniformity
    Patent number: 7127367
    Abstract: Method and apparatus for obtaining a tailored heat transfer profile in a chamber housing a microprocessor manufacturing process, including estimating heat transfer properties of the chamber; estimating heat absorptive properties of a wafer; adjusting the physical characteristics of the chamber to correct the heat transfer properties; and utilizing the chamber for manufacturing microprocessors.
    Type: Grant
    Filed: September 24, 2004
    Date of Patent: October 24, 2006
    Assignee: Applied Materials, Inc.
    Inventors: Balasubramanian Ramachandran, Joseph Michael Ranish, Ravi Jallepally, Sundar Ramamurthy, Raman Achutharaman, Brian Haas, Aaron Hunter
  • Tailored temperature uniformity
    Publication number: 20050102108
    Abstract: Method and apparatus for obtaining a tailored heat transfer profile in a chamber housing a microprocessor manufacturing process, including estimating heat transfer properties of the chamber; estimating heat absorptive properties of a wafer; adjusting the physical characteristics of the chamber to correct the heat transfer properties; and utilizing the chamber for manufacturing microprocessors.
    Type: Application
    Filed: September 24, 2004
    Publication date: May 12, 2005
    Inventors: Balasubramanian Ramachandran, Joseph Ranish, Ravi Jallepally, Sundar Ramamurthy, Raman Achutharaman, Brian Haas, Aaron Hunter