Patents by Inventor Ramaprasad Kulkarni

Ramaprasad Kulkarni has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • System and method for determining type and size of defects on blank reticles
    Patent number: 11468553
    Abstract: A system for characterizing a specimen is disclosed. In one embodiment, the system includes a controller configured to: receive training images of one or more defects of the specimen; generate a machine learning classifier based on the training images; receive product images of one or more defects of a specimen; determine one or more defect type classifications of one or more defects with the machine learning classifier; filter the product images with one or more smoothing filters; perform binarization processes to generate binarized product images; perform morphological image processing operations on the binarized product images; determine one or more algorithm-estimated defect sizes of the one or more defects based on the binarized product images; and determine one or more refined estimates of one or more defect sizes of the one or more defects based on the one or more algorithm-estimated defect sizes and the one or more defect type classifications.
    Type: Grant
    Filed: September 17, 2019
    Date of Patent: October 11, 2022
    Assignee: KLA Corporation
    Inventors: Ramaprasad Kulkarni, Ge Cong, Hawren Fang
  • System and Method for Determining Type and Size of Defects on Blank Reticles
    Publication number: 20200143528
    Abstract: A system for characterizing a specimen is disclosed. In one embodiment, the system includes a controller configured to: receive training images of one or more defects of the specimen; generate a machine learning classifier based on the training images; receive product images of one or more defects of a specimen; determine one or more defect type classifications of one or more defects with the machine learning classifier; filter the product images with one or more smoothing filters; perform binarization processes to generate binarized product images; perform morphological image processing operations on the binarized product images; determine one or more algorithm-estimated defect sizes of the one or more defects based on the binarized product images; and determine one or more refined estimates of one or more defect sizes of the one or more defects based on the one or more algorithm-estimated defect sizes and the one or more defect type classifications.
    Type: Application
    Filed: September 17, 2019
    Publication date: May 7, 2020
    Inventors: Ramaprasad Kulkarni, Ge Cong, Hawren Fang