Patents by Inventor Rani Kipper

Rani Kipper has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Apparatus for in-cassette monitoring of semiconductor wafers
    Patent number: 6833048
    Abstract: A processing apparatus is presented for applying to a substantially flat workpiece contained in a cassette, and a processing tool coupled to the housing. The processing tool is displaceable along three mutually perpendicular axes relative to the cassette for inserting the tool into the gap and moving the tool inside the gap relative to the workpiece. The processing apparatus can be utilized in chemical mechanical polishing arrangement, photolithography arrangement, and CVD arrangement.
    Type: Grant
    Filed: August 27, 2002
    Date of Patent: December 21, 2004
    Assignee: Nova Measuring Instruments Ltd.
    Inventors: Moshe Finarov, Rani Kipper