Patents by Inventor Rauf Shahid

Rauf Shahid has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • ETCH METHOD IN THE MANUFACTURE OF AN INTEGRATED CIRCUIT
    Publication number: 20110027999
    Abstract: The present invention provides a method for etching a substrate in the manufacture of a semiconductor device, the method comprising contacting a surface of the substrate with ions extracted from a plasma formed from a gas comprising one or more of an oxygen-containing species, a nitrogen-containing species and an inert gas, and separately contacting the surface of the substrate with a plasma formed from a gas comprising a fluorine-containing species.
    Type: Application
    Filed: August 16, 2006
    Publication date: February 3, 2011
    Applicant: FREESCALE SEMICONDUCTOR, INC.
    Inventors: Terry G. Sparks, Rauf Shahid