Patents by Inventor Ravikirran Attota

Ravikirran Attota has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Zero-order overlay targets
    Patent number: 7772710
    Abstract: A zero-order overlay target comprises a first zero-order line array fabricated on a first layer of a semiconductor structure, the first zero-order line array having a first pitch, and a second zero-order line array fabricated on a second layer of the semiconductor structure, the second zero-order line array having a second pitch. The second pitch may be different from the first pitch, and a portion of the second zero-order line array may be positioned to become optically coupled to a portion of the first zero-order line array when subject to an overlay measurement. Further, the second pitch may be variable. For example, the variable pitch may comprise a first set of features having a pitch approximately equal to the first pitch, a second set of features having a pitch different from the first pitch, and a third set of features having a pitch approximately equal to the first pitch.
    Type: Grant
    Filed: October 31, 2007
    Date of Patent: August 10, 2010
    Assignees: Sematech, Inc., National Institute of Standards and Technology
    Inventors: Richard Silver, Pete Lipscomb, Bryan Barnes, Ravikirran Attota
  • ZERO-ORDER OVERLAY TARGETS
    Publication number: 20080142998
    Abstract: A zero-order overlay target comprises a first zero-order line array fabricated on a first layer of a semiconductor structure, the first zero-order line array having a first pitch, and a second zero-order line array fabricated on a second layer of the semiconductor structure, the second zero-order line array having a second pitch. The second pitch may be different from the first pitch, and a portion of the second zero-order line array may be positioned to become optically coupled to a portion of the first zero-order line array when subject to an overlay measurement. Further, the second pitch may be variable. For example, the variable pitch may comprise a first set of features having a pitch approximately equal to the first pitch, a second set of features having a pitch different from the first pitch, and a third set of features having a pitch approximately equal to the first pitch.
    Type: Application
    Filed: October 31, 2007
    Publication date: June 19, 2008
    Inventors: Richard Silver, Pete Lipscomb, Bryan Barnes, Ravikirran Attota