Patents by Inventor Raymond Gristi

Raymond Gristi has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Cathode assembly containing an electrostatic chuck for retaining a wafer in a semiconductor wafer processing system
    Patent number: 6219219
    Abstract: A cathode assembly having a pedestal and a detachable susceptor. Various contact assemblies containing a canted spring are utilized to make electrical connection between the pedestal and detachable susceptor. The canted spring has coils that are tilted in one direction and joined end to end to form a doughnut shape. Such a spring creates multiple parallel self-loading electrical connections via the turns of the spring. The turns act like electrical wires to ensure reliable RF electrical energy transfer. The canted spring contact of the present invention allows for flat contact between the pedestal and the chuck.
    Type: Grant
    Filed: September 30, 1998
    Date of Patent: April 17, 2001
    Assignee: Applied Materials, Inc.
    Inventors: Gilbert Hausmann, Anantha Subramani, Peter Satitpunwaycha, Raymond Gristi, Bradley O. Stimson, Chia-Au Bill Lu, Lawrance A. Ringor, Michael N. Sugarman
  • High pressure fitting
    Patent number: 5975590
    Abstract: A high pressure fitting configured to be weldingly coupled to high pressure tubing is provided. The high pressure fitting and/or the tubing welded thereto may be chamfered to provided a smoother welded joint. The interior surface finish of the fitting is smoothed via an abrasive fluid flowed through the fitting's fluid passageway. In fittings comprising a corner, the inner edge of the corner may be rounded by forcibly flowing an abrasive fluid through the fitting. Electropolishing further smoothes the interior surfaces. The inventive fitting allows flow system tolerancing to be tightly controlled by determining a desired distance between two high pressure fittings to be coupled, and adjusting the desired distance by a welded length variable.
    Type: Grant
    Filed: February 17, 1998
    Date of Patent: November 2, 1999
    Assignee: Applied Materials, Inc.
    Inventors: Norman Cowan, Shannon Hart, Raymond Gristi
  • Lift pin for dechucking substrates
    Patent number: 5900062
    Abstract: A lift pin 95 for dechucking a substrate 15 held to a chuck 50 by residual electrostatic charge, the substrate being processed in a plasma formed using RF currents, is described. The lift pin 95 comprises (a) a movable elongated member 110 having a tip 115 suitable for lifting and lowering the substrate 15 off the chuck 50, and capable of forming an electrically conductive path between the substrate 15 and a current sink 105. The electrically conductive path comprises at least one of the following: (1) a frequency selective filter capable of filtering RF currents flowing therethrough so that substantially no RF currents flow through the filter; or (2) a resistor having a resistance sufficiently elevated to reduce the voltage caused by RF currents flowing therethrough, by at least about 50%.
    Type: Grant
    Filed: December 28, 1995
    Date of Patent: May 4, 1999
    Assignee: Applied Materials, Inc.
    Inventors: Peter K. Loewenhardt, Hiroji Hanawa, Raymond Gristi, Gerald Zheyao Yin, Yan Ye