Patents by Inventor Raymond J. Bunkofske

Raymond J. Bunkofske has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Wafer identification mark
    Patent number: 7007855
    Abstract: A semiconductor wafer including a plurality of pits in the semiconductor wafer. The pits are arranged in an information-providing pattern and are readable after completion of processing on the wafer.
    Type: Grant
    Filed: March 17, 2000
    Date of Patent: March 7, 2006
    Assignee: International Business Machines Corporation
    Inventors: Brian C. Barker, Raymond J. Bunkofske, John Z. Colt, Jr., Perry G. Hartswick, John W. Lewis, Nancy T. Pascoe
  • User configurable multivariate time series reduction tool control method
    Patent number: 6678569
    Abstract: A method and structure for controlling a manufacturing tool includes measuring different manufacturing parameters of the tool, transforming a plurality of time series of the manufacturing parameters into intermediate variables based on restrictions and historical reference statistics, generating a surrogate variable based on the intermediate variables, if the surrogate variable exceeds a predetermined limit, identifying a first intermediate variable, of the intermediate variables, that caused the surrogate variable to exceed the predetermined limit and identifying a first manufacturing parameter associated with the first intermediate variable, and inhibiting further operation of the tool until the first manufacturing parameter has been modified to bring the surrogate value within the predetermined limit.
    Type: Grant
    Filed: November 6, 2001
    Date of Patent: January 13, 2004
    Assignee: International Business Machines Corporation
    Inventors: Raymond J. Bunkofske, John Z. Colt, Jr., James J McGill, Nancy T. Pascoe, Maheswaran Surendra, Marc A. Taubenblatt, Asif Ghias
  • User configurable multivariate time series reduction tool control method
    Patent number: 6584368
    Abstract: A method and structure for controlling a manufacturing tool includes measuring different manufacturing parameters of the tool, transforming a plurality of time series of the manufacturing parameters into intermediate variables based on restrictions and historical reference statistics, generating a surrogate variable based on the intermediate variables, if the surrogate variable exceeds a predetermined limit, identifying a first intermediate variable, of the intermediate variables, that caused the surrogate variable to exceed the predetermined limit and identifying a first manufacturing parameter associated with the first intermediate variable, and inhibiting further operation of the tool until the first manufacturing parameter has been modified to bring the surrogate value within the predetermined limit.
    Type: Grant
    Filed: September 17, 2002
    Date of Patent: June 24, 2003
    Assignee: International Business Machines Corporation
    Inventors: Raymond J. Bunkofske, John Z. Colt, Jr., James J. McGill, Nancy T. Pascoe, Maheswaran Surendra, Marc A. Taubenblatt, Asif Ghias
  • User configurable multivariate time series reduction tool control method
    Publication number: 20030055523
    Abstract: A method and structure for controlling a manufacturing tool includes measuring different manufacturing parameters of the tool, transforming a plurality of time series of the manufacturing parameters into intermediate variables based on restrictions and historical reference statistics, generating a surrogate variable based on the intermediate variables, if the surrogate variable exceeds a predetermined limit, identifying a first intermediate variable, of the intermediate variables, that caused the surrogate variable to exceed the predetermined limit and identifying a first manufacturing parameter associated with the first intermediate variable, and inhibiting further operation of the tool until the first manufacturing parameter has been modified to bring the surrogate value within the predetermined limit.
    Type: Application
    Filed: September 17, 2002
    Publication date: March 20, 2003
    Inventors: Raymond J. Bunkofske, John Z. Colt, James J. McGill, Nancy T. Pascoe, Maheswaran Surendra, Marc A. Taubenblatt, Asif Ghias
  • User configurable multivariate time series reduction tool control method
    Patent number: 6442445
    Abstract: A method and structure for controlling a manufacturing tool includes measuring different manufacturing parameters of the tool, transforming a plurality of time series of the manufacturing parameters into intermediate variables based on restrictions and historical reference statistics, generating a surrogate variable based on the intermediate variables, if the surrogate variable exceeds a predetermined limit, identifying a first intermediate variable, of the intermediate variables, that caused the surrogate variable to exceed the predetermined limit and identifying a first manufacturing parameter associated with the first intermediate variable, and inhibiting further operation of the tool until the first manufacturing parameter has been modified to bring the surrogate value within the predetermined limit.
    Type: Grant
    Filed: March 19, 1999
    Date of Patent: August 27, 2002
    Assignee: International Business Machines Corporation,
    Inventors: Raymond J. Bunkofske, John Z. Colt, Jr., James J. McGill, Nancy T. Pascoe, Maheswaran Surendra, Marc A. Taubenblatt, Asif Ghias
  • User configurable multivariate time series reduction tool control method
    Publication number: 20020062162
    Abstract: A method and structure for controlling a manufacturing tool includes measuring different manufacturing parameters of the tool, transforming a plurality of time series of the manufacturing parameters into intermediate variables based on restrictions and historical reference statistics, generating a surrogate variable based on the intermediate variables, if the surrogate variable exceeds a predetermined limit, identifying a first intermediate variable, of the intermediate variables, that caused the surrogate variable to exceed the predetermined limit and identifying a first manufacturing parameter associated with the first intermediate variable, and inhibiting further operation of the tool until the first manufacturing parameter has been modified to bring the surrogate value within the predetermined limit.
    Type: Application
    Filed: November 6, 2001
    Publication date: May 23, 2002
    Inventors: Raymond J. Bunkofske, John Z. Colt, James J. McGill, Nancy T. Pascoe, Maheswaran Surendra, Marc A. Taubenblatt, Asif Ghias