Abstract: A method is provided, including: establishing a session over the Internet with a client device, the session configured to provide for remote control or monitoring of a manufacturing tool over the Internet via communication with a controller of the manufacturing tool, the manufacturing tool being one of a plurality of manufacturing tools in a fabrication facility (FAB); receiving a request from the client device to access an equipment model defining a representation of the manufacturing tool, the representation of the manufacturing tool; receiving data from a controller of the manufacturing tool that is stored in association with a service object of the manufacturing tool; sending to the client device, via the session, a response to the request, the response including the data received from the manufacturing tool that is stored in association with the service object.

Abstract: A multi-client multi-protocol equipment server includes: a host interface that facilitates communication with a manufacturing execution system (MES); a plurality of client interfaces, wherein each client interface facilitates communication with a client based on a Common Equipment Model (CEM) for a semiconductor manufacturing tool; and a plurality of tool interfaces, wherein each tool interface facilitates communication with a semiconductor manufacturing tool, wherein at least one of the interfaces is a Semi Equipment Communications Standard/Generic Model for Communications and Control of Manufacturing Equipment (SECS/GEM) interface that is configured in a single XML file that defines attributes of the CEM for the semiconductor manufacturing tool which uses the SECS/GEM interface, and wherein a computer executes the multi-client multi-protocol server.

Abstract: A method for controlling an automated manufacturing tool for semiconductor fabrication is provided, including the following method operations: receiving, over a network, a request from a client, the request defining an action for an automated manufacturing tool; authenticating the request; and, in response to receiving the request, triggering performance of the action by the automated manufacturing tool.

Abstract: A method and apparatus are disclosed for improving the implementation of automated job management for equipment in a factory. A multi-protocol multi-client equipment server is provided for communicating with equipment and clients utilizing multiple protocols. The equipment server incorporates an object model of each tool and communicates directly in real-time with factory equipment. By providing a multi-protocol multi-client platform, data consumer clients are effectively decoupled from job management clients, allowing next generation station controllers for monitoring and controlling equipment processing to be easily implemented.

Abstract: A method is provided, including: establishing a session over the Internet with a client device, the session configured to provide for remote control or monitoring of a manufacturing tool over the Internet via communication with a controller of the manufacturing tool, the manufacturing tool being one of a plurality of manufacturing tools in a fabrication facility (FAB); receiving a request from the client device to access an equipment model defining a representation of the manufacturing tool, the representation of the manufacturing tool; receiving data from a controller of the manufacturing tool that is stored in association with a service object of the manufacturing tool; sending to the client device, via the session, a response to the request, the response including the data received from the manufacturing tool that is stored in association with the service object.

Abstract: Implementation of a meta-model service of a service oriented architecture industry model repository into a web ontology language representation of at least one topic map meta-model into a plurality of temporal scope topic map meta-models representing states of the at least one topic map meta-model at different times. The implementation includes assigning topics, occurrences, and attributes from the meta-model service to the at least one topic map meta-model. The topics, occurrences, and attributes are assigned from the at least one topic map meta-model to plurality of temporal scope topic map meta-models. The topics, occurrences, and attributes from the plurality of temporal scope topic map meta-models are converted into resource description framework triples; and the resource description framework triples are persisted into the resource description framework repository.

Abstract: A multi-client multi-protocol equipment server includes: a host interface that facilitates communication with a manufacturing execution system (MES); a plurality of client interfaces, wherein each client interface facilitates communication with a client based on a Common Equipment Model (CEM) for a semiconductor manufacturing tool; and a plurality of tool interfaces, wherein each tool interface facilitates communication with a semiconductor manufacturing tool, wherein at least one of the interfaces is a Semi Equipment Communications Standard/Generic Model for Communications and Control of Manufacturing Equipment (SECS/GEM) interface that is configured in a single XML file that defines attributes of the CEM for the semiconductor manufacturing tool which uses the SECS/GEM interface, and wherein a computer executes the multi-client multi-protocol server.

Abstract: A method for controlling an automated manufacturing tool for semiconductor fabrication is provided, including the following method operations: receiving, over a network, a request from a client, the request defining an action for an automated manufacturing tool; authenticating the request; and, in response to receiving the request, triggering performance of the action by the automated manufacturing tool.

Abstract: Implementation of a meta-model service of a service oriented architecture industry model repository into a web ontology language representation of at least one topic map meta-model into a plurality of temporal scope topic map meta-models representing states of the at least one topic map meta-model at different times. The implementation includes assigning topics, occurrences, and attributes from the meta-model service to the at least one topic map meta-model. The topics, occurrences, and attributes are assigned from the at least one topic map meta-model to plurality of temporal scope topic map meta-models. The topics, occurrences, and attributes from the plurality of temporal scope topic map meta-models are converted into resource description framework triples; and the resource description framework triples are persisted into the resource description framework repository.

Abstract: A system for automatically creating a desired software application design. In response to an input to create a desired software application design, functional requirements for the desired software application design are retrieved. Then, non-functional requirements associated with each retrieved functional requirement are retrieved. In addition, software models associated with the retrieved functional requirements are retrieved. Further, software patterns associated with the retrieved non-functional requirements are retrieved. Then, the retrieved software models are transformed into software code for the desired software application design. Also, the retrieved software patterns are applied to associated code sequences in the software code to automatically create an architecture for the desired software application design. Finally, the architecture for the desired software application design is outputted for use by a user.

Abstract: A module for use in a system for processing articles, in which the system includes a plurality of machine tools for processing articles, a pod for carrying the articles to be processed by the machine tools from one machine tool to another, a host processing controller associated with the machine tools for controlling the operation thereof, a robot connected to each machine tool for receiving a pod, opening the pod and for transporting the articles from within the pod into position on the machine tool for processing. An identification device is carried by the pod for identifying a particular pod and the articles carried in the pod. The module includes a single wire connection between the identification system, the host controller and the robot. The module has a microprocessor to identify the source of a signal and for routing the signal between the identification system and the host controller and between the host controller and the robot depending on its source.

Abstract: A building houses a semiconductor manufacturing facility, which is circular in shape and is of a multi-story structure. A silo is located at the center for use in storing and transferring wafers to clean rooms disposed radially around the silo at each floor. Human access is not permitted in the silo and in the clean rooms in order to prevent contamination of the wafers. Due to the modularity of the clean room structures, clean rooms can be reconfigured easily without significant impact on the on-going manufacturing operation. The modularity also permits portions of the facility to be deactivated when not needed.