Abstract: A method for connecting at least one sensor or actuator to a time-controlled bus system, the sensor or actuator carrying out a signal processing in at least two phases, the signal processing in a first phase taking place at a higher speed than in a second phase, the sensor or actuator being synchronized to a time, which is external to the sensor, of the time-controlled bus system in at least one of the phases.

Abstract: A rotation rate sensor having a substrate and a Coriolis element is proposed, the Coriolis element being situated above a surface of a substrate; the Coriolis element being able to be induced to vibrate in parallel to a first axis (X); an excursion of the Coriolis element being detectable, based on a Coriolis force in a second axis (Y), which is provided to be essentially perpendicular to the first axis (X); the first and second axes (X, Y) being provided parallel to the surface of the substrate, wherein force-conveying means are provided, the means being provided to convey a dynamic force effect between the substrate and the Coriolis element.

Abstract: The present invention creates a micromechanical rotational rate sensor having a first Coriolis mass element (2a) and a second Coriolis mass element (2b) which are situated over a surface of a substrate (100); having an activating device by which the first Coriolis mass element (2a) and the second Coriolis mass element (2b) are able to have vibrations activated along a first axis (x); and having a detection device by which deflections of the first Coriolis mass elements (2a) and of the second Coriolis element (2b) are able to be detected along a second axis (y), which is perpendicular to the first axis (x), on the basis of a correspondingly acting Coriolis force; the first axis (x) and second axis (y) running parallel to the surface of the substrate (100);

Abstract: A rotational rate sensor having a substrate and a Coriolis element is proposed, the Coriolis element being situated over a surface of a substrate; a driving arrangement being provided, by which the Coriolis element is induced to vibrations parallel to a first axis; a detection arrangement being provided, by which an excursion of the Coriolis elements is detectable on the basis of a Coriolis force in a second axis that is provided to be essentially perpendicular to the first axis; the first and second axis being parallel to the surface of the substrate; sensor elements that are designated to be at least partially movable with respect to the substrate being provided; a force-conveying arrangement being provided; the force-conveying arrangement being provided to convey a static force effect between the substrate and at least one of the sensor elements.

Abstract: A yaw-rate sensor is proposed having a first and a second Coriolis element (100, 200) which are arranged side-by-side above a surface (1) of a substrate. The Coriolis elements (100, 200) are induced to oscillate parallel to a first axis. Due to a Coriolis force, the Coriolis elements (100, 200) are deflected in a second axis which is perpendicular to the first axis. The first and second Coriolis elements (100, 200) are coupled by a spring (52) which is designed to be yielding in the first and in the second axis. Thus, the frequencies of the oscillations in the two axes are developed differently for the in-phase and antiphase oscillation.

Abstract: A yaw-rate sensor including a first and a second Coriolis element that are arranged side-by-side above a surface of a substrate. The Coriolis elements are induced to oscillate parallel to a first axis Y. Due to a Coriolis force, the Coriolis elements are deflected in a second axis X which is perpendicular to the first axis Y. The oscillations of the first and second Coriolis elements occur in phase opposition to each other on paths which, without the effect of a Coriolis force, are two straight lines parallel to each other.

Abstract: An rate-of-rotation sensor having a Coriolis element, which is arranged over a surface of a substrate, is described. The Coriolis element is induced to oscillate in parallel to a first axis. In response to a Coriolis force, the Coriolis element is deflected in a second axis, which is perpendicular to the first axis. A proof element is provided to prove the deflection.

Abstract: In the method and device for tuning a first oscillator with a second oscillator respective response signals of the first oscillator are produced from corresponding frequency-shifted and/or phase-shifted signals of the second oscillator. The first oscillator is tuned to the second oscillator according to the difference of the respective response signals. For amplitude correction a quotient is formed by dividing an output signal by the sum of the response signals. The method and device according to the invention are especially useful in a rotation rate sensor. The invention also includes a rotation rate sensor, which includes a device for determining rotation rate from the oscillations of a first and second oscillator and the device for tuning the first oscillator with the second oscillator.

Abstract: An rate-of-rotation sensor having a Coriolis element, which is arranged over a surface of a substrate, is described. The Coriolis element is induced to oscillate in parallel to a first axis. In response to a Coriolis force, the Coriolis element is deflected in a second axis, which is perpendicular to the first axis. A proof element is provided to prove the deflection.

Abstract: A yaw-rate sensor is proposed having a first and a second Coriolis element (100, 200) which are arranged side-by-side above a surface (1) of a substrate. The Coriolis elements (100, 200) are induced to oscillate parallel to a first axis. Due to a Coriolis force, the Coriolis elements (100, 200) are deflected in a second axis which is perpendicular to the first axis. The first and second Coriolis elements (100, 200) are coupled by a spring (52) which is designed to be yielding in the first and in the second axis. Thus, the frequencies of the oscillations in the two axes are developed differently for the in-phase and antiphase oscillation.

Abstract: A method and a system for detecting the spatial movement state of moving objects, e.g., vehicles. Due to a, for example, non-cartesian arrangement of four rotational rate sensors and/or acceleration sensors, it is also possible to obtain a redundant signal in addition to the desired useful signal indicating the spatial movement state, e.g., the rotational movement and/or acceleration in space; if this redundant signal is large enough in comparison with the rotational rate actually applied, it may be used for detection of the size of the error and the defective sensor. The four sensors are mounted, for example, on a sensor platform forming a three-sided truncated pyramid so that all possible three-way combinations of sensors are mutually linearly independent. The accuracy about the vertical axis is defined by the angle of inclination of the side faces of the truncated pyramid.

Abstract: A yaw-rate sensor is proposed having a first and a second Coriolis element (100, 200) which are arranged side-by-side above a surface (1) of a substrate. The Coriolis elements (100, 200) are induced to oscillate parallel to a first axis Y. Due to a Coriolis force, the Coriolis elements (100, 200) are deflected in a second axis X which is perpendicular to the first axis Y. The oscillations of the first and second Coriolis elements (100, 200) take place in phase opposition to each other on paths which, without the effect of a Coriolis force, are two straight lines parallel to each other.

Abstract: The invention relates to a device for generating bias voltages for the electrodes of a rotation rate sensor. By evaluating a rotation rate signal and a quadrature signal, control signals are generated, using an adaptive quadrature compensator, that are converted by means of a bias voltage generating arrangement into bias voltages that are delivered to the electrodes of an electrode arrangement disposed underneath the seismic mass or masses of the rotation rate sensor. As a result, the sensor structure can be inclined in such a way that the quadrature signal occurring at the output is minimized. In accordance with a further feature of the invention, the bias voltages generated by the bias voltage generating arrangement are modified, as a function of the output signal of a bandwidth adjusting circuit, in such a way that the amplitude frequency response of the detection motion has a desired bandwidth.

Abstract: A device for determining a rotation rate can be employed in conjunction with a rotation rate sensor which furnishes one or two output signals that among other things are a measure for the Coriolis acceleration and thus also for the rotation rate. The device includes an arrangement for signal processing, with which both digital subtraction of the output signals and an ensuing digital multiplication by a carrier signal shifted in a digital phase shifter are accomplished. The digital multiplication is followed by a digital/analog conversion and low-pass filtration, which in the final analysis furnishes an output signal (DR) that is equivalent to the rotation rate.

Abstract: A device for determining a rotation rate is described, in which by means of digital evaluation circuits the output signals of a rotation rate sensor are evaluated. By identification of the transfer function from the electronically generated oscillation voltage that excites the oscillating body carrying the acceleration elements, to the output of the acceleration elements, or by identification of the transfer function from the electrically generated test voltage at the input of the acceleration elements to their output, the systematic errors of the rotation rate sensor are determined and taken into account in the digital sensor signal processing, with the aid of which the rotation rate is unequivocally determined.