Patents by Inventor Reisa MATSUMOTO

Reisa MATSUMOTO has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Cleaning method
    Patent number: 11488813
    Abstract: A method for cleaning a microwave plasma processing apparatus which has a processing container and a microwave radiation part, and which has a window part provided at a position where the microwave radiation part is disposed in the processing container, includes a cleaning step of adjusting a pressure to a pressure corresponding to a size of a cleaning target part, among parts within the processing container including a wall surface of the processing container, the microwave radiation part, and the window part, while supplying a cleaning gas, and performing a cleaning process using plasma of the cleaning gas.
    Type: Grant
    Filed: May 30, 2019
    Date of Patent: November 1, 2022
    Assignee: TOKYO ELECTRON LIMITED
    Inventors: Satoshi Itoh, Takafumi Nogami, Eita Yokokura, Reisa Matsumoto
  • CLEANING METHOD
    Publication number: 20210249240
    Abstract: Provided is a method for cleaning a microwave plasma processing apparatus which has a processing container and a microwave radiation part, and which has a window part provided at a position where the microwave radiation part is disposed in the processing container. The method includes a cleaning step of adjusting a pressure to a pressure corresponding to a size of a cleaning target part, among parts within the processing container including a wall surface of the processing container, the microwave radiation part, and the window part, while supplying a cleaning gas, and performing a cleaning process using plasma of the cleaning gas.
    Type: Application
    Filed: May 30, 2019
    Publication date: August 12, 2021
    Inventors: Satoshi ITOH, Takafumi NOGAMI, Eita YOKOKURA, Reisa MATSUMOTO