Abstract: A MEMS device, such as a microphone, uses a perforated plate. The plate comprises an array of holes across the plate area. The plate has an area formed as a grid of polygonal cells, wherein each cell comprises a line of material following a path around the polygon thereby defining an opening in the centre. In one aspect, the line of material forms a path along each side of the polygon which forms a track which extends at least once inwardly from the polygon perimeter towards the centre of the polygon and back outwardly to the polygon perimeter. This defines a meandering hexagon side wall, which functions as a local spring suspension.

Abstract: A read out circuit for a sensor uses a feedback loop to bias the sensor to a desired operating point, such as the maximal possible sensitivity, but without the problem of an instable sensor position as known for the conventional read-out with constant charge. The reference bias to which the circuit is controlled is also varied using feedback control, but with a slower response than the main bias control feedback loop.

Abstract: The present invention relates to an integrated electronic-microfluidic device an integrated electronic-microfluidic device, comprising a semiconductor substrate (106) on a first (122) support, an electronic circuit (102, 104) on a first semiconductor-substrate side of the semiconductor substrate, and a signal interface structure to an external device. The signal interface structure is arranged on the first semiconductor-substrate side and configured to receive electrical signals from the electronic circuit. A microfluidic structure (126) is formed in the semiconductor substrate, and is configured to confine a fluid and to allow a flow of the fluid to and from the microfluidic structure only on a second semiconductor-substrate side that is opposite to the first semiconductor-substrate side and faces away form the first support. The electronic-microfluidic device forms a flexible platform for the formation of various System-in-Package applications.

Abstract: A MEMS device, such as a microphone, uses a fixed perforated plate. The fixed plate comprises an array of holes across the plate area. At least a set of the holes adjacent the outer periphery comprises a plurality of rows of elongate holes, the rows at different distances from the periphery. This design improves the mechanical robustness of the membrane and can additionally allow tuning of the mechanical behaviour of the plate.

Abstract: An integrated electronic-micro fluidic device an integrated electronic-micro fluidic device, comprising a semiconductor substrate on a first support, an electronic circuit on a first semiconductor-substrate side of the semiconductor substrate, and a signal interface structure to an external device. A micro fluidic structure is formed in the semiconductor substrate, and is configured to confine a fluid and to allow a flow of the fluid to and from the microfluidic structure only on a second semiconductor-substrate side that is opposite to the first semiconductor-substrate side and faces away from the first support.

Abstract: The invention relates to a integrated circuit comprising an electronic circuit integrated on a substrate (5), and further comprising protections means for protection of the electronic circuit (25). The protection means comprise: i) a first strained encapsulation layer (10) being provided on a first side of the substrate (5), wherein the first strained encapsulation layer (10) has a strain (S1) in a direction parallel to the substrate (5), and ii) disabling means (20) arranged for at least partially disabling the electronic circuit (25) under control of a strain change in the substrate (5). The invention further relates to a method of manufacturing such integrated circuit, and to a system comprising such integrated circuit. Such system is selected from a group comprising: a bank-card, a smart-card, a contact-less card and an RFID.

Abstract: A MEMS manufacturing method and device in which a spacer layer is provided over a side wall of at least one opening in a structural layer which will define the movable MEMS element. The opening extends below the structural layer. The spacer layer forms a side wall portion over the side wall of the at least one opening and also extends below the level of the structural layer to form a contact area.

Abstract: A microphone and a method for manufacturing the same. The microphones includes a substrate die; and a microphone and an accelerometer formed from the substrate die. The accelerometer is adapted to provide a signal for compensating mechanical vibrations of the substrate die.

Abstract: A capacitive micro-electromechanical system (MEMS) microphone includes a semiconductor substrate having an opening that extends through the substrate. The microphone has a membrane that extends across the opening and a back-plate that extends across the opening. The membrane is configured to generate a signal in response to sound. The back-plate is separated from the membrane by an insulator and the back-plate exhibits a spring constant. The microphone further includes a back-chamber that encloses the opening to form a pressure chamber with the membrane, and a tuning structure configured to set a resonance frequency of the back-plate to a value that is substantially the same as a value of a resonance frequency of the membrane.

Abstract: The invention relates to a integrated circuit comprising an electronic circuit integrated on a substrate (5), and further comprising protections means for protection of the electronic circuit (25). The protection means comprise: i) a first strained encapsulation layer (10) being provided on a first side of the substrate (5), wherein the first strained encapsulation layer (10) has a strain (S1) in a direction parallel to the substrate (5), and ii) disabling means (20) arranged for at least partially disabling the electronic circuit (25) under control of a strain change in the substrate (5). The invention further relates to a method of manufacturing such integrated circuit, and to a system comprising such integrated circuit. Such system is selected from a group comprising: a bank-card, a smart-card, a contact-less card and an RFID.

Abstract: Batteries based on solid-state electrolytes are known in the art. These (planar) energy sources, or solid-state batteries, efficiently convert chemical energy into electrical energy and can be used as the power sources for portable electronics. The invention relates to a method for manufacturing of a solid-state battery in which the pinholes in a solid electrolyte are at least partially filled by the deposition of an electrically insulating layers. The invention also relates to a battery obtained by performing such a method. The invention further relates to an electronic device provided with such a battery.

Abstract: The invention relates to an improved electrochemical energy source, comprising: a substrate, and at least one stack deposited onto said substrate, the stack comprising: an first electrode, a second electrode, and an intermediate solid-state electrolyte separating the first electrode and the second electrode. The invention also relates to an electronic device provided with such an electrochemical energy source.

Abstract: The present invention relates to a solid-state variable capacitor, comprising a first capacitor plate (10), a second capacitor plate (12), extending substantially parallel to the first capacitor plate (10) and on a distance from said first capacitor plate, wherein at least the first capacitor plate (10) is structurally coupled to one side of a first layered solid-state battery wherein the layers (4-8) of said first solid-state battery (3) extend substantially parallel to the first capacitor plate (10) and wherein the first solid-state battery is susceptible to variations in the size in the direction perpendicular to the plane of its layers (4-8). This invention is based on the realization that the thickness of a solid-state battery (3) varies with conditions prevailing in the battery. The movable capacitor plate (10) causes a change of the capacitance value of the capacitor.

Abstract: The invention relates to a remotely readable electronic device (10), particularly an implantable device, with an O associated reader (20). The device comprises a resonance circuit (12) that can selectively be set into one of at least three different resonance states, wherein this state can wirelessly be sensed by the remote reader. In a particular embodiment, the resonance circuit (12) comprises two capacitors (C1, C2) that can selectively be connected or disconnected to the resonance circuit (12). The reader (20) preferably scans a given frequency range to detect spectral absorption patterns that correspond to certain resonance states of the resonance circuit (12).

Abstract: An implantable medical system for electrical recording and or providing therapy to a plurality of tissue sites without damage to surrounding blood vessels is disclosed comprising: an implant body having a plurality of therapy elements, the elements being hingedly attached at one end to the surface of the body and releasably extendable outward from the surface of the body at the other end; a release mechanism for each of the elements; and a coating material covering the body and the elements; wherein upon dissolution of the coating material after implantation, the release mechanism is capable of causing the elements to extend outward at one end from the surface of the body and into a plurality of tissue sites without damage to the surrounding blood vessels. The method of implanting the system into a body is also disclosed.

Abstract: Presently, many variations of possible integrated resistors are utilized in IC design. However, depending on the electrical circuit it is often desirable that a resistor does not have a constant value, but rather that such a resistor has a variable controllable value. The invention relates to a solid-state variable resistor. The invention also relates to an electronic device, comprising such a solid-state variable resistor. The invention further relates to a method for producing a solid-state variable resistor.

Abstract: The invention relates to an electrochemical energy source, comprising a substrate and at least one electrochemical cell deposited onto said substrate, wherein the cell comprises an anodic electrode, a cathodic electrode and an electrolyte separating said anodic electrode and said cathodic electrode and wherein the cathodic electrode comprises at least one non-oxidic composition, said composition comprising active species. The invention disclosed in this document describes how a battery, consisting of a lithium alloy anodic electrode and a cathodic electrode made of this different class of materials mentioned above, might be a suitable alternative for a battery stack comprising conventionally used materials, especially in applications in which a high current capability is essential.

Abstract: An electrochemical energy source, comprising: a substrate, and at least one stack deposited onto said substrate, the stack comprising: an anode, a cathode, and an intermediate electrolyte separating said anode and said cathode; and at least one electron-conductive barrier layer being deposited between the substrate and the anode, which barrier layer is adapted to at least substantially preclude diffusion of active species of the stack into said substrate.

Abstract: A device is provided that includes a battery layer on a substrate, where a first battery cell is formed in the battery layer. The first battery cell includes a first anode, a first cathode, and a first electrolyte arranged between the first anode and the first cathode, where the first anode, the first cathode, and the first electrolyte are arranged in the battery layer such that perpendicular projections onto the substrate of each of the first anode and the first cathode are non-overlapping. A method of manufacturing such device is also provided. A system is also provide that includes such device for supplying power to an electronic device.

Abstract: The invention relates to an electrochemical energy source, comprising: a substrate, and at least one stack deposited onto said substrate, the stack comprising: an anode, a cathode, and an intermediate solid-state electrolyte separating said anode and said cathode; and at least one electron-conductive barrier layer being deposited between the substrate and the anode, which barrier layer is adapted to at least substantially preclude diffusion of active species of the stack into said substrate. The invention further relates to a method for manufacturing such an electrochemical energy source, comprising the steps of: A) depositing at least one electron-conductive barrier layer onto the substrate, and B) depositing at least one stack of an anode, an solid-state electrolyte, and a cathode successively onto said electron-conductive barrier layer.