Abstract: The invention relates to a method of fabricating a micro machined channel, comprising the steps of providing a substrate of a first material and having a buried layer of a different material therein, and forming at least two trenches in said substrate by removing at least part of said substrate. Said trenches are provided at a distance from each other and at least partly extend substantially parallel to each other, as well as towards said buried layer. The method comprises the step of forming at least two filled trenches by providing a second material different from said first material and filling said at least two trenches with at least said second material; forming an elongated cavity in between said filled trenches by removing at least part of said substrate extending between said filled trenches; and forming an enclosed channel by providing a layer of material in said cavity and enclosing said cavity.

Abstract: The invention relates to a microelectromechanical system (MEMS) component or microfluidic component comprising a free-hanging or free-standing microchannel (1), as well as methods for manufacturing such a microchannel, as well as a flow sensor, e.g. a thermal flow sensor or a Coriolis flow sensor, pressure sensor or multi-parameter sensor, valve, pump or microheater, comprising such a microelectromechanical system component or microfluidic component. The MEMS component allows to increase the flow range and/or decrease the pressure drop of for instance a micro Coriolis mass flow meter by increasing the channel diameter, while maintaining its advantages.

Abstract: The invention relates to a micro-Coriolis mass flow sensor, comprising a Coriolis tube having a fixed inlet and a fixed outlet, being fixed in tube fixation means, excitation means for oscillating the Coriolis tube about an excitation axis, detection means (8) for detecting, in use, at least a measure for movements of part of the Coriolis tube, characterized by the detection means (8) comprising one or more strain measurement devices (9, 11) configured for resistive readout being arranged in or on the Coriolis tube.

Abstract: The invention relates to a channel comprising device (1) comprising a channel (10) with a channel wall (15), a channel inlet (11) and a channel outlet (12), wherein the channel wall comprises a polymer (150),wherein the polymer (150) comprises an epoxy-based polymer. The invention further relates to a system (1000) comprising a Coriolis-type flow measuring device(50) comprising the channel comprising device (1) according to the invention and an actuation system (450) configured to let at least part of the channel (10) vibrate thereby causing temporary displacements. The invention, further relates a method for measuring a property of a fluid, wherein the property of the fluid is a property selected form the group consisting of a mass flow rate of the fluid and a density of the fluid.

Abstract: The invention relates to a method of fabricating a micro machined channel, comprising the steps of providing a substrate of a first material and having a buried layer of a different material therein, and forming at least two trenches in said substrate by removing at least part of said substrate. Said trenches are provided at a distance from each other and at least partly extend substantially parallel to each other, as well as towards said buried layer. The method comprises the step of forming at least two filled trenches by providing a second material different from said first material and filling said at least two trenches with at least said second material; forming an elongated cavity in between said filled trenches by removing at least part of said substrate extending between said filled trenches; and forming an enclosed channel by providing a layer of material in said cavity and enclosing said cavity.

Abstract: The invention relates to a flow measurement system for determining a flow of a medium, comprising a Coriolis flow sensor, a thermal flow sensor and a processing unit connected thereto. According to the invention, the processing unit is arranged for determining, based on the output signals of both the Coriolis flow sensor and the thermal sensor, at least one of the thermal conductivity and the specific heat capacity of a medium in the flow measurement system. The invention further relates to a method of determining at least one of the thermal conductivity and the specific heat capacity of a medium.

Abstract: The invention relates to a Coriolis flow sensor, comprising at least a Coriolis-tube, wherein the flow sensor comprises an excitation element for causing the tube to oscillate, as well as a detection element for detecting at least a measure of displacements of parts of the tube during operation. In some embodiments, the detection element comprises two detection elements that are positioned on both sides of the Coriolis tube, wherein the detection elements partly overlap each other.

Abstract: The invention relates to a fluid flow device (1), comprising a system chip (11) having a substrate (12), a flow channel (21) defined within said substrate, and a sensor unit (41) connected to said flow channel for determining a property of a fluid in said flow channel. Furthermore, a valve unit (30) is provided within said substrate, for regulating fluid flow through said flow channel. The valve unit comprises a valve chamber (31) defined within said substrate, and a valve member (32) that is movably arranged within the valve chamber. The flow channel has a connection channel part (22) defined within said substrate (12), wherein said connection channel part is connected to said valve unit. Further, control means connected to said valve unit and said sensor unit are provided. The control means are arranged for controlling said valve unit based on signals obtained by said sensor unit.

Abstract: The invention relates to a Coriolis flow sensor, comprising at least a Coriolis-tube, wherein the flow sensor comprises excitation means for causing the tube to oscillate, as well as detection means for detecting at least a measure of displacements of parts of the tube during operation. According to the invention, the detection means comprise two detection elements that are positioned on both sides of the Coriolis tube, wherein the detection elements partly overlap each other.

Abstract: The invention relates to a fluid flow regulator device, comprising a valve member and a valve seat arranged to be movable with respect to each other such that a fluid flow surface area defined by the valve member and the valve seat can be changed. Furthermore, sensor means are provided for measuring a capacitance related to at least a measure of the fluid flow surface area. According to the invention, the sensor means are arranged such that the capacitance measured is inversely proportional to the distance between the valve member and the valve seat. In an embodiment, a reference capacitance relating to fluid flow conditions is measured.

Abstract: The invention relates to a fluid flow device (1), comprising a system chip (11) having a substrate (12), a flow channel (21) defined within said substrate, and a sensor unit (41) connected to said flow channel for determining a property of a fluid in said flow channel. Furthermore, a valve unit (30) is provided within said substrate, for regulating fluid flow through said flow channel. The valve unit comprises a valve chamber (31) defined within said substrate, and a valve member (32) that is movably arranged within the valve chamber. The flow channel has a connection channel part (22) defined within said substrate (12), wherein said connection channel part is connected to said valve unit. Further, control means connected to said valve unit and said sensor unit are provided. The control means are arranged for controlling said valve unit based on signals obtained by said sensor unit.

Abstract: The invention relates to a device (1) for determining the combustion value of a fuel. The device (1) comprises a fuel inlet (40) for supplying the fuel to be measured to the device (1). A gas inlet (50) is provided for supplying an oxygen-containing gas to the device (1). The device (1) further comprises a combustion unit connected to the fuel inlet (40) and the gas inlet (50), which combustion unit is provided with a combustion chamber (7) for combusting the fuel to be measured therein. A gas outlet (8) connected to the combustion chamber (7) makes it possible to discharge the combusted gas. The device (1) according to the invention comprises a flow measurement unit (14), preferably of the Coriolis type, disposed between the fuel inlet (40) and the combustion chamber (7).

Abstract: The invention relates to a method and a system for determining the fractions of a flowing gaseous medium that comprises a known plurality N of known components. The method comprises the steps for determining at least N?1 parameters of a flowing gaseous medium. The N?1 parameters are chosen from a group of quantities comprising mass flow, density, viscosity, and heat capacity. At least N?1 reference values are provided for each of the known N components relating to each of the determined N?1 quantities. The fraction of each of the known components of the supplied gaseous medium is determined through solving of at least N equations. The N equations comprise N?1 equations which describe each determined parameter as a function of the fraction and the reference values, plus an equation that sets the sum of the fractions so as to be equal to 100%.

Abstract: The invention relates to a fluid flow regulator device, comprising a valve member and a valve seat arranged to be movable with respect to each other such that a fluid flow surface area defined by the valve member and the valve seat can be changed. Furthermore, sensor means are provided for measuring a capacitance related to at least a measure of the fluid flow surface area. According to the invention, the sensor means are arranged such that the capacitance measured is inversely proportional to the distance between the valve member and the valve seat. In an embodiment, a reference capacitance relating to fluid flow conditions is measured.

Abstract: A sensing device for measuring force and/or torque includes a top part with a top electrode structure, a bottom part with a bottom electrode structure, and a support structure. The support structure includes spring elements for supporting the top part on the bottom part with the top electrode structure parallel to and facing the bottom electrode structure. The spring elements provide a gap between the top and bottom electrode structures and allow displacement of the top part relative to the bottom part in three orthogonal directions two parallel and one perpendicular to the bottom plate, and for rotation of the top part relative to the bottom part around three orthogonal axes, corresponding with the two parallel and one perpendicular directions. The displacement and/or rotation induce a change in distance between and/or overlap area of the top and bottom electrodes and a corresponding change of capacitance.

Abstract: The invention relates to a device (1) for determining the combustion value of a fuel. The device (1) comprises a fuel inlet (40) for supplying the fuel to be measured to the device (1). A gas inlet (50) is provided for supplying an oxygen-containing gas to the device (1). The device (1) further comprises a combustion unit connected to the fuel inlet (40) and the gas inlet (50), which combustion unit is provided with a combustion chamber (7) for combusting the fuel to be measured therein. A gas outlet (8) connected to the combustion chamber (7) makes it possible to discharge the combusted gas. The device (1) according to the invention comprises a flow measurement unit (14), preferably of the Coriolis type, disposed between the fuel inlet (40) and the combustion chamber (7).

Abstract: A sensing device for measuring force and/or torque includes a top part with a top electrode structure, a bottom part with a bottom electrode structure, and a support structure. The support structure includes spring elements for supporting the top part on the bottom part with the top electrode structure parallel to and facing the bottom electrode structure. The spring elements provide a gap between the top and bottom electrode structures and allow displacement of the top part relative to the bottom part in three orthogonal directions two parallel and one perpendicular to the bottom plate, and for rotation of the top part relative to the bottom part around three orthogonal axes, corresponding with the two parallel and one perpendicular directions. The displacement and/or rotation induce a change in distance between and/or overlap area of the top and bottom electrodes and a corresponding change of capacitance.

Abstract: The invention relates to a flow meter for determining a flow of a medium. The flow meter comprises a flow tube for transporting the medium whose flow is to be measured. The flow tube has a supply end and a discharge end disposed downstream thereof. The flow meter is provided with a first flow sensor for measuring the flow of the medium at a first position of the flow tube. The flow meter is provided with a second flow sensor for measuring the flow of the medium at a second position of the flow tube.

Abstract: The invention relates to a flow meter for determining a flow of a medium. The flow meter comprises a flow tube for transporting the medium whose flow is to be measured. The flow tube has a supply end and a discharge end disposed downstream thereof. The flow meter is provided with a first flow sensor for measuring the flow of the medium at a first position of the flow tube. The flow meter is provided with a second flow sensor for measuring the flow of the medium at a second position of the flow tube.

Abstract: A flowmeter including a system chip with a silicon substrate provided on a carrier, in an opening whereof at least one silicon flow tube is provided for transporting a medium whose flow rate is to be measured, the tube having two ends that issue via a wall of the opening into channels coated with silicon nitride in the silicon substrate, wherein the flow tube forms part of a Coriolis flow sensor and/or a thermal flow sensor, and wherein the channels are preferably in communication through the carrier with connection lines to the external world.