Patents by Inventor Remco Van Der Berg

Remco Van Der Berg has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for the chemical treatment of a semiconductor substrate
    Patent number: 6316371
    Abstract: Method for the chemical treatment of a semiconductor substrate at a raised temperature, such as oxidization. To achieve a uniform treatment of comparatively large wafers in the radial direction, as well as to realize a uniform treatment during the simultaneous treatment of a number of semiconductor substrates placed one after each other, it is proposed, starting with an inert atmosphere, to gradually add oxygen and at the end of the treatment to gradually reduce the oxygen portion.
    Type: Grant
    Filed: March 30, 1999
    Date of Patent: November 13, 2001
    Assignee: ASM International N.V.
    Inventors: Theodorus Gerardus Maria Oosterlaken, Frank Huussen, Remco Van Der Berg