Patents by Inventor Renatus Klaver

Renatus Klaver has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Displacement measurement systems lithographic apparatus and device manufacturing method
    Publication number: 20070223007
    Abstract: A displacement measurement system configured to provide measurement of the relative displacement of two components in six degrees of freedom with improved consistency and without requiring excessive space.
    Type: Application
    Filed: March 21, 2006
    Publication date: September 27, 2007
    Applicant: ASML Netherlands B.V.
    Inventors: Renatus Klaver, Erik Loopstra, Engelbertus Fransiscus Van Der Pasch