Patents by Inventor Rex Stone

Rex Stone has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 9059115
    Abstract: Some embodiments include methods of forming memory. A series of photoresist features may be formed over a gate stack, and a placeholder may be formed at an end of said series. The placeholder may be spaced from the end of said series by a gap. A layer may be formed over and between the photoresist features, over the placeholder, and within said gap. The layer may be anisotropically etched into a plurality of first vertical structures along edges of the photoresist features, and into a second vertical structure along an edge of the placeholder. A mask may be formed over the second vertical structure. Subsequently, the first vertical structures may be used to pattern string gates while the mask is used to pattern a select gate. Some embodiments include methods of forming conductive runners, and some embodiments may include semiconductor constructions.
    Type: Grant
    Filed: December 4, 2013
    Date of Patent: June 16, 2015
    Assignee: Micron Technology, Inc.
    Inventors: David A. Kewley, Brian Cleereman, Stephen W. Russell, Rex Stone, Anthony C. Krauth
  • Publication number: 20140087558
    Abstract: Some embodiments include methods of forming memory. A series of photoresist features may be formed over a gate stack, and a placeholder may be formed at an end of said series. The placeholder may be spaced from the end of said series by a gap. A layer may be formed over and between the photoresist features, over the placeholder, and within said gap. The layer may be anisotropically etched into a plurality of first vertical structures along edges of the photoresist features, and into a second vertical structure along an edge of the placeholder. A mask may be formed over the second vertical structure. Subsequently, the first vertical structures may be used to pattern string gates while the mask is used to pattern a select gate. Some embodiments include methods of forming conductive runners, and some embodiments may include semiconductor constructions.
    Type: Application
    Filed: December 4, 2013
    Publication date: March 27, 2014
    Applicant: Micron Technology, Inc.
    Inventors: David A. Kewley, Brian Cleereman, Stephen W. Russell, Rex Stone, Anthony C. Krauth
  • Patent number: 8609489
    Abstract: Some embodiments include methods of forming memory. A series of photoresist features may be formed over a gate stack, and a placeholder may be formed at an end of said series. The placeholder may be spaced from the end of said series by a gap. A layer may be formed over and between the photoresist features, over the placeholder, and within said gap. The layer may be anisotropically etched into a plurality of first vertical structures along edges of the photoresist features, and into a second vertical structure along an edge of the placeholder. A mask may be formed over the second vertical structure. Subsequently, the first vertical structures may be used to pattern string gates while the mask is used to pattern a select gate. Some embodiments include methods of forming conductive runners, and some embodiments may include semiconductor constructions.
    Type: Grant
    Filed: June 6, 2011
    Date of Patent: December 17, 2013
    Assignee: Micron Technology, Inc.
    Inventors: David A. Kewley, Brian Cleereman, Stephen W. Russell, Rex Stone, Anthony C. Krauth
  • Publication number: 20110237081
    Abstract: Some embodiments include methods of forming memory. A series of photoresist features may be formed over a gate stack, and a placeholder may be formed at an end of said series. The placeholder may be spaced from the end of said series by a gap. A layer may be formed over and between the photoresist features, over the placeholder, and within said gap. The layer may be anisotropically etched into a plurality of first vertical structures along edges of the photoresist features, and into a second vertical structure along an edge of the placeholder. A mask may be formed over the second vertical structure. Subsequently, the first vertical structures may be used to pattern string gates while the mask is used to pattern a select gate. Some embodiments include methods of forming conductive runners, and some embodiments may include semiconductor constructions.
    Type: Application
    Filed: June 6, 2011
    Publication date: September 29, 2011
    Applicant: MICRON TECHNOLOGY, INC.
    Inventors: David A. Kewley, Brian Cleereman, Stephen W. Russell, Rex Stone, Anthony C. Krauth
  • Patent number: 7972926
    Abstract: Some embodiments include methods of forming memory. A series of photoresist features may be formed over a gate stack, and a placeholder may be formed at an end of said series. The placeholder may be spaced from the end of said series by a gap. A layer may be formed over and between the photoresist features, over the placeholder, and within said gap. The layer may be anisotropically etched into a plurality of first vertical structures along edges of the photoresist features, and into a second vertical structure along an edge of the placeholder. A mask may be formed over the second vertical structure. Subsequently, the first vertical structures may be used to pattern string gates while the mask is used to pattern a select gate. Some embodiments include methods of forming conductive runners, and some embodiments may include semiconductor constructions.
    Type: Grant
    Filed: July 2, 2009
    Date of Patent: July 5, 2011
    Assignee: Micron Technology, Inc.
    Inventors: David A. Kewley, Brian Cleereman, Stephen W. Russell, Rex Stone, Anthony C. Krauth
  • Publication number: 20110003469
    Abstract: Some embodiments include methods of forming memory. A series of photoresist features may be formed over a gate stack, and a placeholder may be formed at an end of said series. The placeholder may be spaced from the end of said series by a gap. A layer may be formed over and between the photoresist features, over the placeholder, and within said gap. The layer may be anisotropically etched into a plurality of first vertical structures along edges of the photoresist features, and into a second vertical structure along an edge of the placeholder. A mask may be formed over the second vertical structure. Subsequently, the first vertical structures may be used to pattern string gates while the mask is used to pattern a select gate. Some embodiments include methods of forming conductive runners, and some embodiments may include semiconductor constructions.
    Type: Application
    Filed: July 2, 2009
    Publication date: January 6, 2011
    Inventors: David A. Kewley, Brian Cleereman, Stephen W. Russell, Rex Stone, Anthony C. Krauth
  • Patent number: 6943071
    Abstract: A nonvolatile memory cell comprising a pair of spaced apart shallow trench isolation regions formed in a substrate and defining a substrate active region. A tunnel dielectric is formed on the substrate active region. A floating gate is formed on the tunnel dielectric and is self aligned between the spaced apart shallow trench isolation regions. A dielectric layer is formed on the floating gate and a control gate formed on the dielectric layer. A source region and a drain region are formed in the substrate active region on opposite sides of the floating gate.
    Type: Grant
    Filed: June 3, 2002
    Date of Patent: September 13, 2005
    Assignee: Intel Corporation
    Inventors: Albert Fazio, Krishna Parat, Glen Wada, Neal Mielke, Rex Stone
  • Patent number: 6518618
    Abstract: A nonvolatile memory cell comprising a pair of spaced apart shallow trench isolation regions formed in a substrate and defining a substrate active region. A tunnel dielectric is formed on the substrate active region. A floating gate is formed on the tunnel dielectric and is self aligned between the spaced apart shallow trench isolation regions. A dielectric layer is formed on the floating gate and a control gate formed on the dielectric layer. A source region and a drain region are formed in the substrate active region on opposite sides of the floating gate.
    Type: Grant
    Filed: December 3, 1999
    Date of Patent: February 11, 2003
    Assignee: Intel Corporation
    Inventors: Albert Fazio, Krishna Parat, Glen Wada, Neal Mielke, Rex Stone
  • Publication number: 20020149050
    Abstract: A nonvolatile memory cell comprising a pair of spaced apart shallow trench isolation regions formed in a substrate and defining a substrate active region. A tunnel dielectric is formed on the substrate active region. A floating gate is formed on the tunnel dielectric and is self aligned between the spaced apart shallow trench isolation regions. A dielectric layer is formed on the floating gate and a control gate formed on the dielectric layer. A source region and a drain region are formed in the substrate active region on opposite sides of the floating gate.
    Type: Application
    Filed: June 3, 2002
    Publication date: October 17, 2002
    Inventors: Albert Fazio, Krishna Parat, Glen Wada, Neal Mielke, Rex Stone