Patents by Inventor Richard C. Ockovic

Richard C. Ockovic has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Surface cleaning using an argon or nitrogen aerosol
    Patent number: 5294261
    Abstract: A method is disclosed for cleaning microelectronic surfaces using an aerosol of at least substantially solid argon or nitrogen particles which impinge upon the surface to be cleaned and then evaporate and the resulting gas is removed by venting along with the contaminants dislodged by the cleaning method.
    Type: Grant
    Filed: November 2, 1992
    Date of Patent: March 15, 1994
    Assignees: Air Products and Chemicals, Inc., International Business Machines Corporation
    Inventors: Wayne T. McDermott, Richard C. Ockovic, Jin J. Wu, Douglas W. Cooper, Alexander Schwarz, Henry L. Wolfe
  • Diffusion gas diluter
    Patent number: 5231865
    Abstract: A diffusion diluter is described and a method for using such apparatus with a condensation nucleus counter, wherein a particle containing reactive gas is diluted with an inert diluent gas to diminish the reactive character of the particle-containing gas without disturbing the particle concentration of the gas allowing it to be accurately and safely measured for its particle content.
    Type: Grant
    Filed: January 2, 1992
    Date of Patent: August 3, 1993
    Assignee: Air Products and Chemicals, Inc.
    Inventors: Wayne T. McDermott, Richard C. Ockovic
  • Apparatus to clean solid surfaces using a cryogenic aerosol
    Patent number: 5209028
    Abstract: The present invention is an apparatus for cleaning semi-conductor solid surfaces using a spray of frozen cryogen, such as argon, to impinge on the solid surface to remove contaminant particles. The apparatus includes an appropriate nozzle positioned in a housing designed for ultra clean conditions including sweep gas supply and evacuation conduits and a support table movably positioned within the housing to controllably convey the semi-conductor solid surface on a track under the spray of frozen cryogen emanating from the nozzle.
    Type: Grant
    Filed: October 9, 1992
    Date of Patent: May 11, 1993
    Assignees: Air Products and Chemicals, Inc., International Business Machines Corporation
    Inventors: Wayne T. McDermott, Jin J. Wu, Richard C. Ockovic
  • Surface cleaning using a cryogenic aerosol
    Patent number: 5062898
    Abstract: A method is disclosed for cleaning microelectronics surfaces using an aerosol of at least substantially solid argon particles which impinge upon the surface to be cleaned and then evaporate and the resulting gas is removed by venting along with the contaminants dislodged by the cleaning method.
    Type: Grant
    Filed: June 5, 1990
    Date of Patent: November 5, 1991
    Assignees: Air Products and Chemicals, Inc., International Business Machines Corporation
    Inventors: Wayne T. McDermott, Richard C. Ockovic, Jin J. Wu, Douglas W. Cooper, Alexander Schwarz, Henry L. Wolfe
  • Process for sizing particles using condensation nucleus counting
    Patent number: 5026155
    Abstract: A process for counting and sizing particles in gases in the size range of 0.0025 micrometers or greater using condensation nucleus counting wherein the condensing temperature of a saturated working fluid is incrementally adjusted to adjust sensitivity to differing sizes of particles and thus discriminate according to size.
    Type: Grant
    Filed: September 6, 1989
    Date of Patent: June 25, 1991
    Assignee: Air Products and Chemicals, Inc.
    Inventors: Richard C. Ockovic, Wayne T. McDermott, Alexander Schwarz