Abstract: Disclosed is a method implemented for outputting model(s) for developing or operating a process for a CGT. The method includes receiving, storing, and accessing data items; determining attributes of the data items; selecting one or more machine learning models based on the attributes; accessing one or more mechanistic models; integrating the one or more machine learning models with the one or more mechanistic models to obtain one or more integrated models; selecting one or more predictive models from the one or more machine learning models, the one or more mechanistic models, and the one or more integrated models; applying the one or more predictive models to the data items; adjusting one or more values of one or more parameters of the one or more predictive models to reduce uncertainty in model prediction; and outputting the one or more predictive models with the one or more adjusted values.

Abstract: The present invention provides methods for fabricating semiconductor structures and devices, particularly ultra-shallow doped semiconductor structures exhibiting low electrical resistance. Methods of the present invention use modification of the composition of semiconductor surfaces to allow fabrication of a doped semiconductor structure having a selected dopant concentration depth profile, which provides useful junctions and other device components in microelectronic and nanoelectronic devices, such as transistors in high density integrated circuits. Surface modification in the present invention also allows for control of the concentration and depth profile of defects, such as interstitials and vacancies, in undersaturated semiconductor materials.

Abstract: A model predictive control process which approximates a constraint set as an ellipsoid to directly address actuator limitations, to provide a robust controller structure, and reduce computation demands. A bounded polytope defining the constraint set is approximated as an ellipsoid in an off-line computation. The ellipsoid is scaled on line via bisection to determine the ellipsoid that optimally fits the polytope, calculating a set of control moves for manipulating device actuators. Preferably, an unconstrained solution is first computed and tested to see if any constraints are violated. If none are violated, it is accepted, if one or more are violated, the scaling is reconducted as a constrained solution in iterative fashion until the solution yields an active constraint.