Patents by Inventor Richard E. Pingree, Jr.

Richard E. Pingree, Jr. has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Plasma apparatus, gas distribution assembly for a plasma apparatus and processes therewith
    Patent number: 8580076
    Abstract: A plasma apparatus, various components of the plasma apparatus, and an oxygen free and nitrogen free processes for effectively removing photoresist material and post etch residues from a substrate with a carbon and/or hydrogen containing low k dielectric layer(s).
    Type: Grant
    Filed: May 22, 2003
    Date of Patent: November 12, 2013
    Assignee: LAM Research Corporation
    Inventors: Alan Frederick Becknell, Thomas James Buckley, David Ferris, Richard E. Pingree, Jr., Palanikumaran Sakthivel, Aseem Kumar Srivastava, Carlo Waldfried
  • Method and system for detection of solid materials in a plasma using an electromagnetic circuit
    Patent number: 8119413
    Abstract: A method for solid material detection in a medium includes receiving an exhaust gas downstream with respect to a workpiece from which a photoresist material is removed. An electromagnetic circuit is configured to include the exhaust gas, the exhaust gas is excited with electromagnetic energy and an impedance value of the electromagnetic circuit is determined, wherein the impedance value corresponds to an amount of solid material within the exhaust gas.
    Type: Grant
    Filed: July 26, 2010
    Date of Patent: February 21, 2012
    Assignee: Axcelis Technologies, Inc.
    Inventors: Richard E. Pingree, Jr., Palanikumara Sakthivel, Mahesh Vanodia, Michael B. Colson
  • METHOD AND SYSTEM FOR DETECTION OF SOLID MATERIALS IN A PLASMA USING AN ELECTROMAGNETIC CIRCUIT
    Publication number: 20100289510
    Abstract: A method for solid material detection in a medium includes receiving an exhaust gas downstream with respect to a workpiece from which a photoresist material is removed. An electromagnetic circuit is configured to include the exhaust gas, the exhaust gas is excited with electromagnetic energy and an impedance value of the electromagnetic circuit is determined, wherein the impedance value corresponds to an amount of solid material within the exhaust gas.
    Type: Application
    Filed: July 26, 2010
    Publication date: November 18, 2010
    Applicant: AXCELIS TECHNOLOGIES, INC.
    Inventors: Richard E. Pingree, JR., Palanikumara Sakthivel, Mahesh Vanodia, Michael B. Colson
  • Method and system for detection of solid materials in a plasma using an electromagnetic circuit
    Patent number: 7794663
    Abstract: A method for solid material detection in a medium includes receiving an exhaust gas downstream with respect to a workpiece from which a photoresist material is removed. An electromagnetic circuit is configured to include the exhaust gas, the exhaust gas is excited with electromagnetic energy and an impedance value of the electromagnetic circuit is determined, wherein the impedance value corresponds to an amount of solid material within the exhaust gas.
    Type: Grant
    Filed: February 19, 2004
    Date of Patent: September 14, 2010
    Assignee: Axcelis Technologies, Inc.
    Inventors: Richard E. Pingree, Jr., Palanikumara Sakthivel, Muhesh Vanodia, Michael B. Colson
  • Hydrocarbon dielectric heat transfer fluids for microwave plasma generators
    Patent number: 7338575
    Abstract: A process and apparatus for cooling a plasma tube generally includes flowing a hydrocarbon dielectric heat transfer fluid into a space defined by the plasma tube and a concentric tube surrounding the plasma tube. In one embodiment, the hydrocarbon fluid is selected to have a dissipation factor less than 0.002 and a thermal efficiency coefficient greater than or equal to 1.30 kJ/kg*K.
    Type: Grant
    Filed: September 10, 2004
    Date of Patent: March 4, 2008
    Assignee: Axcelis Technologies, Inc.
    Inventors: Richard E. Pingree, Jr., Michael Bruce Colson, Michael Silbert
  • Pseudo-spring loading mechanism for magnetron tuner
    Patent number: 5495145
    Abstract: A apparatus for tuning a resonant cavity of a magnetron is provided which prevents undesired frequency fluctuation during thermal cycling or vibration. The magnetron has an axially disposed resonant cavity comprising a plurality of radially disposed anode vanes. Alternating ones of the vanes are electrically connected together by a first and a second strap, respectively. The tuning apparatus comprises a tuner shaft having a threaded outside diameter, a vertical gear having a threaded inside diameter engaging the threaded outside diameter of the tuner shaft, and a worm gear engaging the vertical gear. Rotation of the worm gear translates to axial movement of the tuner shaft. A ceramic cylinder is coupled to the tuner shaft at an end adjacent to the resonant cavity, and extends into a space defined between the first and second straps by the axial movement of the tuner shaft. Disposition of the ceramic cylinder within the space alters capacitance measurable between the straps.
    Type: Grant
    Filed: July 12, 1994
    Date of Patent: February 27, 1996
    Assignee: Litton Systems, Inc.
    Inventor: Richard E. Pingree, Jr.