Patents by Inventor Richard E. Stallcup
Richard E. Stallcup has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20230258707Abstract: A nanoprober system can land a probe onto a device under test (DUT) by positioning a conductive probe above the DUT by a motion control device; applying electrical signals between the conductive probe and the DUT; measuring electrical responses from the applied electrical signal; calculating impedance magnitude values and / or phase angle values based on the measured electrical response values; causing the conductive probe to move towards the DUT while continuing to calculate impedance magnitude values and / or phase angle values from measured electrical response; determining that the conductive probe has contacted the DUT based on a change in the calculated impedance magnitude values and / or phase angle values; and signaling to the motion control device to stop moving the probe towards the DUT based on the change in the calculated impedance magnitude values and / or phase angle values.Type: ApplicationFiled: September 13, 2022Publication date: August 17, 2023Inventors: Richard E Stallcup, II, Michael Berkmyre, Carlo Floresca, Ronen Benzion
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Publication number: 20230168274Abstract: An automated system for controlling a conductive probe of a nanoprober system in situ to a charged particle beam (CPB) imaging system can include a nanoprober comprising an actuator and a conductive probe; signal measurement circuitry electrically coupled to the conductive probe and to receive an electrical signal from the conductive probe; and a hardware processor to execute operations. The operations can include activating a CPB within a first reference frame, the first reference frame associated with the CPB; causing, by a computerized control system, the CPB and the conductive probe to intersect; measuring an electrical response from the intersection of the CPB with the conductive probe; and determining a location of the conductive probe in a second reference frame based on the electric response from the intersection of the CPB with the conductive probe, the second reference frame associated with the conductive probe.Type: ApplicationFiled: November 29, 2022Publication date: June 1, 2023Inventors: Richard E Stallcup, II, Michael Berkmyre, Ronen Benzion, Carlo Floresca
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Patent number: 7799132Abstract: A patterned layer is formed by removing nanoscale passivating particle from a first plurality of nanoscale structural particles or by adding nanoscale passivating particles to the first plurality of nanoscale structural particles. Each of a second plurality of nanoscale structural particles is deposited on each of corresponding ones of the first plurality of nanoscale structural particles that is not passivated by one of the plurality of nanoscale passivating particles.Type: GrantFiled: December 13, 2007Date of Patent: September 21, 2010Assignee: Zyvex Labs, LLCInventors: John N. Randall, Jingping Peng, Jun-Fu Liu, George D. Skidmore, Christof Baur, Richard E. Stallcup, Robert J. Folaron
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Patent number: 7675300Abstract: An apparatus including a positioner control device, a measuring device and a control routine. The positioner control device is communicatively coupled to a chamber of a charged particle beam device (CPBD) and is configured to individually manipulate each of a plurality of probes within the CPBD chamber to establish contact between ones of the plurality of probes and corresponding ones of a plurality of contact points of a sample positioned in the CPBD chamber. The measuring device is communicatively coupled to the CPBD and the positioner control device and is configured to perform one of a measurement and a detection of a characteristic associated with one of the plurality of contact points. The control routine is configured to at least partially automate control of at least one of the CPBD, the positioner control device and the measuring device.Type: GrantFiled: December 17, 2007Date of Patent: March 9, 2010Assignee: Zyvex Instruments, LLCInventors: Christof Baur, Robert J. Folaron, Adam Hartman, Philip C. Foster, Jay C. Nelson, Richard E. Stallcup, II
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Publication number: 20080150557Abstract: An apparatus including a positioner control device, a measuring device and a control routine. The positioner control device is communicatively coupled to a chamber of a charged particle beam device (CPBD) and is configured to individually manipulate each of a plurality of probes within the CPBD chamber to establish contact between ones of the plurality of probes and corresponding ones of a plurality of contact points of a sample positioned in the CPBD chamber. The measuring device is communicatively coupled to the CPBD and the positioner control device and is configured to perform one of a measurement and a detection of a characteristic associated with one of the plurality of contact points. The control routine is configured to at least partially automate control of at least one of the CPBD, the positioner control device and the measuring device.Type: ApplicationFiled: December 17, 2007Publication date: June 26, 2008Applicant: ZYVEX INSTRUMENTS, LLCInventors: Christof BAUR, Robert J. FOLARON, Adam HARTMAN, Philip C. FOSTER, Jay C. NELSON, Richard E. STALLCUP
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Patent number: 7326293Abstract: A patterned layer is formed by removing nanoscale passivating particle from a first plurality of nanoscale structural particles or by adding nanoscale passivating particles to the first plurality of nanoscale structural particles. Each of a second plurality of nanoscale structural particles is deposited on each of corresponding ones of the first plurality of nanoscale structural particles that is not passivated by one of the plurality of nanoscale passivating particles.Type: GrantFiled: March 25, 2005Date of Patent: February 5, 2008Assignee: Zyvex Labs, LLCInventors: John N. Randall, Jingping Peng, Jun-Fu Liu, George D. Skidmore, Christof Baur, Richard E. Stallcup, II, Robert J. Folaron
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Patent number: 7319336Abstract: An apparatus including a positioner control device, a measuring device and a control routine. The positioner control device is communicatively coupled to a chamber of a charged particle beam device (CPBD) and is configured to individually manipulate each of a plurality of probes within the CPBD chamber to establish contact between ones of the plurality of probes and corresponding ones of a plurality of contact points of a sample positioned in the CPBD chamber. The measuring device is communicatively coupled to the CPBD and the positioner control device and is configured to perform one of a measurement and a detection of a characteristic associated with one of the plurality of contact points. The control routine is configured to at least partially automate control of at least one of the CPBD, the positioner control device and the measuring device.Type: GrantFiled: February 23, 2005Date of Patent: January 15, 2008Assignee: Zyvex Instruments, LLCInventors: Christof Baur, Robert J. Folaron, Adam Hartman, Philip C. Foster, Jay C. Nelson, Richard E. Stallcup, II
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Patent number: 7285778Abstract: A method including directing a first electrical signal to at least one of a plurality of probes each positioned within a chamber of a charged particle beam device. At least one of the plurality of probes is exposed to a charged particle beam of the charged particle beam device, and a second electrical signal is compared to the first electrical signal to determine a characteristic associated with the at least one of the plurality of probes.Type: GrantFiled: February 23, 2005Date of Patent: October 23, 2007Assignee: Zyvex CorporationInventors: Christof Baur, Richard E. Stallcup, II
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Patent number: 6987277Abstract: A method for manipulating a nanoscale object deposited on a substrate. The surface of the substrate is passive. A target position is formed on the passive surface by the action of the tip of a scanning probe microscope. The nanoscale object is picked from its initial position by the tip of the scanning probe microscope, then placed and released at the target position.Type: GrantFiled: October 10, 2003Date of Patent: January 17, 2006Assignee: Zyvex CorporationInventors: Christof Baur, Richard E. Stallcup, II
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Patent number: 6812460Abstract: A method of nano-manipulation, including providing a nano-scale object movably positioned over a substrate and positioning a probe of a scanning probe microscope proximate the nano-scale object. The probe is then moved across the substrate along a gyrating path proximate the nano-scale object to reposition the nano-scale object.Type: GrantFiled: October 7, 2003Date of Patent: November 2, 2004Assignee: Zyvex CorporationInventors: Richard E. Stallcup, II, Christof Baur