Patents by Inventor Richard Gustav HAGBORG

Richard Gustav HAGBORG has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Sensor assembly and methods of vapor monitoring in process chambers
    Patent number: 11721566
    Abstract: Methods and systems for monitoring film thickness using a sensor assembly include a process chamber having a chamber body, a substrate support disposed in the chamber body, a lid disposed over the chamber body, and a sensor assembly coupled to the chamber body at a lower portion of the sensor assembly. The sensor assembly is coupled to the lid at an upper portion of the sensor assembly. The sensor assembly includes one or more apertures disposed through one or more sides of the sensor assembly, and the one or more sensors are disposed in the sensor assembly through the one or more of the apertures.
    Type: Grant
    Filed: July 13, 2021
    Date of Patent: August 8, 2023
    Assignee: Applied Materials, Inc.
    Inventors: Xiaozhou Che, Graeme Jamieson Scott, Richard Gustav Hagborg, Alan H. Ouye, Nelson A. Yee
  • SENSOR ASSEMBLY AND METHODS OF VAPOR MONITORING IN PROCESS CHAMBERS
    Publication number: 20230018891
    Abstract: One or more embodiments described herein generally relate to methods and systems for monitoring film thickness using a sensor assembly. In embodiments described herein, a process chamber having a chamber body, a substrate support disposed in the chamber body, a lid disposed over the chamber body, and a sensor assembly coupled to the chamber body at a lower portion of the sensor assembly. The sensor assembly is coupled to the lid at an upper portion of the sensor assembly. The sensor assembly includes one or more apertures disposed through one or more sides of the sensor assembly, and the one or more sensors are disposed in the sensor assembly through the one or more of the apertures.
    Type: Application
    Filed: July 13, 2021
    Publication date: January 19, 2023
    Inventors: Xiaozhou CHE, Graeme Jamieson SCOTT, Richard Gustav HAGBORG, Alan H. OUYE, Nelson A. YEE