Patents by Inventor Richard H. Hartley

Richard H. Hartley has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Differential ellipsometer
    Patent number: 5061072
    Abstract: A differential ellipsometer to measure the epitaxial growth of crystalization materials by molecular beam epitaxy. The ellipsometer projects a light beam (3) to the surface, and the reflected light beam (5) is returned to another point on the surface with the P and s linear polarization states interchanged. The output beam (7) from the further point is brought into interference with part of the incident beam for measurement or analysis.
    Type: Grant
    Filed: October 31, 1989
    Date of Patent: October 29, 1991
    Assignee: c/o The Secretary, Comonwealth of Australia Department of Defence
    Inventors: Margaret A. Folkard, Richard H. Hartley
  • Control of uniformity of growing alloy film
    Patent number: 4934313
    Abstract: Apparatus for the control of growth of epitaxial alloy films onto a substrate. A uniformity measurement probe scans the growing film and controls a corrector gun directing a corrector beam to the film. The probe and gun are correlated to determine the relevant characteristics of a point on the growing film and to apply a particular correction. Possible deposition alloys are cadmium, mercury and tellurium with the corrector beam being selected from one or more of these specie.
    Type: Grant
    Filed: June 17, 1988
    Date of Patent: June 19, 1990
    Assignee: Commonwealth of Australia
    Inventor: Richard H. Hartley
  • Control of uniformity of growing alloy film
    Patent number: 4770895
    Abstract: A method and apparatus for the control of growth of epitaxial alloy films onto a substrate. A uniformity measurement probe (5-6) scans the growing film and controls a corrector gun (9) directing a corrector beam (8) to the film. The probe (5-6) and gun (9) are correlated to determine the relevant characteristics of a point on the growing film and to apply a particular correction. Possible deposition alloys are cadmium, mercury and tellurium with the corrector beam being selected from one or more of these specie.
    Type: Grant
    Filed: April 7, 1987
    Date of Patent: September 13, 1988
    Assignee: The Commonwealth of Australia
    Inventor: Richard H. Hartley