Patents by Inventor Richard J. Palicka

Richard J. Palicka has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Ceramic heater with thermal pipe for improving temperature uniformity, efficiency and robustness and manufacturing method
    Publication number: 20030019858
    Abstract: A ceramic heater for heating a substrate in a semiconductor manufacturing apparatus is disclosed. The ceramic heater, which contains a thermal heat pipe made from Graphfoil embedded in, e.g., AIN, permits <1° C. temperature difference from the center to the edge of a substrate in a substrate holder.
    Type: Application
    Filed: July 27, 2001
    Publication date: January 30, 2003
    Applicant: APPLIED MATERIALS, INC.
    Inventors: Charles N. Dornfest, Harold H. Mortensen, Richard J. Palicka
  • Method of manufacturing boron carbide armor tiles
    Patent number: 4824624
    Abstract: A method of providing fastener holes in extremely hard ceramic armor comprises the steps of:(a) providing a billet of precompacted ceramic powder material;(b) drilling the desired holes in the billet;(c) preparing a plug of non-sintering material that is chemically compatible with and has compaction characteristics similar to the ceramic powder material;(d) pressing the plugs into the billet holes;(e) hot pressing the billet and plugs at conventional temperature and pressure for manufacture of a ceramic armor structure, and;(f) removing plugs by conventional tooling or sandblasting.
    Type: Grant
    Filed: December 17, 1984
    Date of Patent: April 25, 1989
    Assignee: Ceradyne, Inc.
    Inventors: Richard J. Palicka, John A. Negrych