Patents by Inventor Richard Naylor-Smith

Richard Naylor-Smith has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Multi directional mechanical scanning in an ion implanter
    Patent number: 7105838
    Abstract: An end station for an ion implanter has a vacuum chamber which receives an ion beam. A wafer holder is mounted at the distal end of a scanning arm which has its proximal end attached to the chamber wall. The scanning arm has at least two rotary joints providing articulation of the arm to permit movement of the wafer holder in two orthogonal scan directions in a scan plane transverse to the beam path through the vacuum chamber. A scanning arm driver moves the substrate holder in the scan plane in a desired two-dimensional scan pattern relative to the beam path.
    Type: Grant
    Filed: June 20, 2003
    Date of Patent: September 12, 2006
    Assignee: Applied Materials, Inc.
    Inventors: Richard Naylor-Smith, Simon Frederick Dillon, Richard Cooke
  • Multi directional mechanical scanning in an ion implanter
    Publication number: 20050173655
    Abstract: An end station for an ion implanter has a vacuum chamber which receives an ion beam. A wafer holder is mounted at the distal end of a scanning arm which has its proximal end attached to the chamber wall. The scanning arm has at least two rotary joints providing articulation of the arm to permit movement of the wafer holder in two orthogonal scan directions in a scan plane transverse to the beam path through the vacuum chamber. A scanning arm driver moves the substrate holder in the scan plane in a desired two-dimensional scan pattern relative to the beam path.
    Type: Application
    Filed: June 20, 2003
    Publication date: August 11, 2005
    Inventors: Richard Naylor-Smith, Simon Dillon, Richard Cooke