Patents by Inventor Richard Pingree

Richard Pingree has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Hydrocarbon dielectric heat transfer fluids for microwave plasma generators
    Publication number: 20060054281
    Abstract: A process and apparatus for cooling a plasma tube generally includes flowing a hydrocarbon dielectric heat transfer fluid into a space defined by the plasma tube and a concentric tube surrounding the plasma tube. In one embodiment, the hydrocarbon fluid is selected to have a dissipation factor less than 0.002 and a thermal efficiency coefficient greater than or equal to 1.30 kJ/kg*K.
    Type: Application
    Filed: September 10, 2004
    Publication date: March 16, 2006
    Inventors: Richard Pingree, Michael Colson, Michael Silbert
  • METHOD AND SYSTEM FOR DETECTION OF SOLID MATERIALS IN A PLASMA USING AN ELECTROMAGNETIC CIRCUIT
    Publication number: 20050186680
    Abstract: A method for solid material detection in a medium includes receiving an exhaust gas downstream with respect to a workpiece from which a photoresist material is removed. An electromagnetic circuit is configured to include the exhaust gas, the exhaust gas is excited with electromagnetic energy and an impedance value of the electromagnetic circuit is determined, wherein the impedance value corresponds to an amount of solid material within the exhaust gas.
    Type: Application
    Filed: February 19, 2004
    Publication date: August 25, 2005
    Applicant: AXCELIS TECHNOLOGIES, INC.
    Inventors: Richard Pingree, Palanikumara Sakthivel, Muhesh Vanodia, Michael Colson
  • Microwave plasma discharge device
    Patent number: 5961851
    Abstract: A method of removing material from a substrate, and a plasma discharge device wherein a plasma is excited by microwave energy having an electric field which is azimuthally and axially uniform in relation to the plasma tube. The microwave cavity is divided longitudinally into sections by conducting partitions, each of which is separately fed with microwave energy, and the plasma tube extends through openings in the partitions.
    Type: Grant
    Filed: April 2, 1996
    Date of Patent: October 5, 1999
    Assignee: Fusion Systems Corporation
    Inventors: Mohammad Kamarehi, Richard Pingree, Jianou Shi, Gerald Cox
  • Electrodeless lamp starting/operation with sources at different frequencies
    Patent number: 5767626
    Abstract: An electrodeless lamp is started by coupling microwave power of a first frequency to a lamp cavity, while the discharge is maintained by coupling microwave power of a second frequency, wherein the first frequency is lower than the second frequency. A cooling fluid is impinged on the lamp bulb immediately before the application of the microwave power of the first frequency.
    Type: Grant
    Filed: December 6, 1995
    Date of Patent: June 16, 1998
    Assignee: Fusion Systems Corporation
    Inventors: Mohammad Kamarehi, Richard Pingree, Jianou Shi