Abstract: An electronic device comprising a cell region comprising stacks of alternating dielectric materials and conductive materials. A pillar region is adjacent to the cell region and comprises storage node segments adjacent to adjoining oxide materials and adjacent to a tunnel region. The storage node segments are separated by a vertical portion of the tunnel region. A high-k dielectric material is adjacent to the conductive materials of the cell region and to the adjoining oxide materials of the pillar region. Additional electronic devices are disclosed, as are methods of forming an electronic device and related systems.

Abstract: Titanium subhydride is produced in a reactor by heating a selected amount of finely divided titanium compound at a selected temperature for a selected period of time under dynamic vacuum conditions. Hydrogen is removed substantially uniformly from each powder grain and there is produced a subhydride of substantially uniform titanium-hydrogen composition. Selection of the amount, temperature and time produces a subhydride of selected titanium-hydrogen composition.